# US 10,872,749 B2 · Textured skin for chamber components > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,872,749 B2 - Document ID: US10872749B2 - Status: Granted - Kind: B2 - Application number: 15/659,617 - Filed: 2017-07-26 - Published: 2018-03-15 - Granted: 2020-12-22 - Earliest claimed: 2016-09-13 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Gangadhar Sheelavant; Cariappa Achappa Baduvamanda; Kaushik Vaidya; Bopanna Ichettira Vasantha - Web page: https://patentgrep.com/patent/US10872749B2 ## CPC - H01J 37/32853: {Hygiene} - B33Y 80/00: Products made by additive manufacturing - C23C 16/4404: {Coatings or surface treatment on the inside of the reaction chamber or on parts thereof} - C23C 16/45565: {Shower nozzles} - C23C 16/4581: {characterised by material of construction or surface finish of the means for supporting the substrate} - H01J 37/32477: {characterised by the means for protecting vessels or internal parts, e.g. coatings} - H01J 37/3488: {Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - B33Y: ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract A chamber component for a processing chamber is disclosed herein. In one embodiment, a chamber component for a processing chamber has a base component body. The base component body has an exterior surface configured to face a processing environment of the processing chamber. A textured skin is conformable to the exterior surface. The textured skin has a first side configured to be disposed against the exterior surface and a second side facing away from the first side. The second side has a plurality of engineered features configured to enhance adhesion of material deposited on the textured skin during use of the processing chamber. ## Claims ### Claim 1 A chamber component for a processing chamber, the chamber component comprising: a base component body having an exterior surface configured to face a processing environment of the processing chamber; and a textured skin covering an entirety of the exterior surface facing the processing environment and conformable to the exterior surface, the textured skin comprising: a first side configured to be disposed against the exterior surface and the first side conformal to the exterior surface; a second side facing away from the first side, the first side and second side defining a thickness of the textured skin; and a plurality of engineered features formed in a repetitive pattern and regularly spaced across the second side facing the processing environment while absent on the first side, wherein the engineered features are configured to enhance adhesion of material deposited on the textured skin during use of the processing chamber. ### Claim 2 (depends on 1) The chamber component of claim 1, further comprising: an adhesive disposed between the textured skin and the base component body, wherein the adhesive bonds the textured skin thereto the base component body. ### Claim 3 (depends on 1) The chamber component of claim 1, wherein the textured skin is press fit to the base component body and bonded thereto. ### Claim 4 (depends on 1) The chamber component of claim 1, wherein the textured skin has an interlock feature that mechanically and removably interlocks the textured skin to the base component body. ### Claim 5 (depends on 1) The chamber component of claim 1, wherein the textured skin is shrink fit to the base component body to bond thereto. ### Claim 6 (depends on 1) The chamber component of claim 1, wherein the textured skin is 3D printed on the base component body. ### Claim 7 (depends on 1) The chamber component of claim 1, wherein the bond between the textured and the base component body is removable. ### Claim 8 An engineered film for a shield of a processing chamber, the engineered film comprising: a base having a process facing surface and a bottom surface opposite the process facing surface, the base being conformal to the shield; a plurality of engineered features formed in a repetitive pattern and regularly spaced on the process facing surface and not on the bottom surface, the engineered features configured to enhance adhesion of material deposited on the engineered film during use of the processing chamber; and an interlock feature configured to secure the engineered film covering the shield, wherein the base, the engineered features and the interlock feature form the engineered film. ### Claim 9 (depends on 8) The engineered film of claim 8, wherein the interlock feature is configured to allow the engineered film to be bonded to and removed from the shield while the shield is disposed in the processing chamber. ### Claim 10 (depends on 9) The engineered film of claim 9, wherein the interlock feature comprises: a mechanical fastener comprised of a stem coupled to a bulb. ### Claim 11 (depends on 9) The engineered film of claim 9, wherein the interlock feature comprises: an adhesive material. ### Claim 12 (depends on 9) The engineered film of claim 9, wherein the interlock feature comprises: press fitting the engineered film to the shield. ### Claim 13 (depends on 9) The engineered film of claim 9, wherein the interlock feature comprises: shrink fitting the engineered film to the shield. ### Claim 14 A processing chamber, comprising: a body having walls, a lid and a bottom defining a processing volume therein; and a chamber component disposed in and exposed to the processing volume, the chamber component comprising: a base component body having an exterior surface configured to face a processing environment of the processing chamber; and a textured skin covering an entirety of the exterior surface and disposed between the exterior surface and processing volume, the textured skin conformable to the exterior surface, the textured skin having a first side configured to be disposed against the exterior surface and a second side facing away from the first side, the second side comprising a plurality of engineered features formed in a repetitive pattern and regularly spaced across the second side facing the processing volume, the engineered features configured to enhance adhesion of material deposited on the textured skin during use of the processing chamber. ### Claim 15 (depends on 14) The processing chamber of claim 14, wherein the chamber component of further comprises: an adhesive disposed between the textured skin and the base component body wherein the adhesive bonds the textured skin thereto the base component body. ### Claim 16 (depends on 14) The processing chamber of claim 14, wherein the textured skin is press fit to the base component body and bonded thereto. ### Claim 17 (depends on 14) The processing chamber of claim 14, wherein the chamber component of further comprises: a mechanical interlock disposed between the textured skin and the base component body bonding the textured skin thereto the base component body. ### Claim 18 (depends on 14) The processing chamber of claim 14, wherein the textured skin is shrink fit to the base component body to bond thereto. ### Claim 19 (depends on 14) The processing chamber of claim 14, wherein the textured skin is 3D printed on the base component body. ### Claim 20 (depends on 14) The processing chamber of claim 14, wherein the bond between the textured skin and the base component body is removable.