# US 10,872,745 B2 · Charged-particle beam system

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- Number: US 10,872,745 B2
- Document ID: US10872745B2
- Status: Granted
- Kind: B2
- Application number: 16/494,454
- Filed: 2017-03-27
- Published: 2020-01-16
- Granted: 2020-12-22
- Earliest claimed: 2017-03-27
- Assignees: Hitachi High-Tech Corporation
- Applicants: Hitachi High-Technologies Corporation
- Inventors: Akio Yamamoto; Kazuki Ikeda; Wen Li; Hiroyuki Takahashi; Shahedul Hoque; Shunsuke Mizutani
- Web page: https://patentgrep.com/patent/US10872745B2

## CPC

- H01J 37/222: {Image processing arrangements associated with the tube}
- H01J 37/244: Detectors; Associated components or circuits therefor
- H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)}
- H01J 2237/2443: Scintillation detectors
- H01J 2237/24475: Scattered electron detectors
- H01J 2237/24495: Signal processing, e.g. mixing of two or more signals
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A charged-particle beam system comprises: a charged-particle beam device containing a detection unit for detecting electrons generated by irradiating a sample with a charged-particle beam released from a charged particle source; and a signal detection unit in which a detection signal from the detection unit is input through a wiring. The signal detection unit comprises: a separation unit for separating into a rising signal and a falling signal the detection signal from the detection unit; a falling signal processing unit for at least eliminating ringing in the falling signal; and a combination unit generating and delivering a combined signal produced by combining the rising signal, which has been separated by the separation unit, with the falling signal wherefrom the ringing has been eliminated by the falling signal processing unit.

## Claims

### Claim 1

A charged-particle beam system, comprising:
a charged-particle beam device that includes a detection unit that detects electrons generated by irradiating a sample with a charged-particle beam released from a charged particle source; and
a signal detection unit in which a detection signal from the detection unit is input through a wiring, wherein the signal detection unit includes
a separation unit configured to separate the detection signal from the detection unit into a rising signal and a falling signal,
a falling signal processing unit configured to eliminate ringing in the falling signal, and
a combination unit configured to generate and output a combined signal produced by combining the rising signal, which has been separated by the separation unit, with the falling signal wherefrom the ringing has been eliminated by the falling signal processing unit.

### Claim 2 (depends on 1)

The charged-particle beam system according to claim 1, wherein
the falling signal processing unit includes:
a ringing elimination unit that eliminates the ringing of the falling signal, and
a pulse width shortening unit that shortens a pulse width of the falling signal.

### Claim 3 (depends on 1)

The charged-particle beam system according to claim 1, wherein
the separation unit detects a rising edge and peak of the detection signal and separates the detection signal into the rising signal and the falling signal.

### Claim 4 (depends on 2)

The charged-particle beam system according to claim 2, wherein
the ringing elimination unit eliminates the ringing generated in the falling signal by superimposing on the detection signal a reflected signal generated by the detection signal being reflected between the detection unit and the signal detection unit through the wiring.

### Claim 5 (depends on 2)

The charged-particle beam system according to claim 2, wherein
the ringing elimination unit is configured with a high pass filter or an integrator, and
the pulse width shortening unit is configured with a low pass filter or a differentiator.

### Claim 6 (depends on 1)

The charged-particle beam system according to claim 1, wherein the signal detection unit includes an A/D conversion unit that converts the detection signal from the detection unit into a digital signal and outputs the converted digital signal to the separation unit.

### Claim 7 (depends on 1)

The charged-particle beam system according to claim 1, further comprising a calculation unit, wherein
the charged-particle beam device includes a plurality of the detection units, and
detection signals from the plurality of detection units are respectively input to the plurality of signal detection units, and the calculation unit performs addition calculation or subtraction calculation on output signals from the plurality of signal detection units and outputs the obtained signals.

### Claim 8 (depends on 1)

The charged-particle beam system according to claim 1, wherein
the detection unit of the charged-particle beam device is disposed in a vacuum, and
the signal detection unit is disposed in the atmosphere.

### Claim 9 (depends on 1)

The charged-particle beam system according to claim 1, wherein the detection unit of the charged-particle beam device detects reflected electrons reflected from the sample as electrons generated by irradiating the sample with the charged-particle beam.