# US 10,872,660 B2 · Resistive memory devices with transition metal dichalcogenide (TMD) materials as ballast resistors to control current flow through the devices > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,872,660 B2 - Document ID: US10872660B2 - Status: Granted - Kind: B2 - Application number: 16/465,967 - Filed: 2016-12-30 - Published: 2020-01-23 - Granted: 2020-12-22 - Earliest claimed: 2016-12-30 - Assignees: Intel Corporation - Applicants: Intel Corporation - Inventors: Abhishek A. Sharma; Ravi Pillarisetty; Van H. Le; Gilbert Dewey - Web page: https://patentgrep.com/patent/US10872660B2 ## CPC - G11C 13/0007: {comprising metal oxide memory material, e.g. perovskites} - H10B 63/30: {comprising selection components having three or more electrodes, e.g. transistors} - H10N 70/011: {Manufacture or treatment of multistable switching devices} - H10N 70/24: {based on migration or redistribution of ionic species, e.g. anions, vacancies} - H10N 70/826: {adapted for essentially vertical current flow, e.g. sandwich or pillar type devices} - H10N 70/828: {Current flow limiting means within the switching material region, e.g. constrictions} - H10N 70/841: {Electrodes} - H10N 70/882: {Compounds of sulfur, selenium or tellurium, e.g. chalcogenides} - H10N 70/8833: {Binary metal oxides, e.g. TaOx} - G11C: STATIC STORES (semiconductor memory devices H10B) - H10B: ELECTRONIC MEMORY DEVICES - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR ## Abstract In one embodiment, systems, methods, and apparatus are described that can reduce the peak current through semiconductor memory devices such as RRAM devices. In one embodiment, transition metal dichalcogenide (TMD) materials can be used to in connection with both the transistors and the memory (for example, RRAM) devices. In one embodiment, two-dimensional (2D) materials, that is, materials that are on the order of a few angstroms thick can be used in connection with both the transistors and the memory (for example, RRAM) devices. In one embodiment, the TMD layer(s) and/or the 2D material(s) can act as a ballast to the RRAM device that can control the current flow through the RRAM device. In one embodiment, the systems, methods, and apparatus can serve to reduce the current as the voltage increases at a predetermined range, a property that can be referred to as negative differential resistance (NDR). ## Claims ### Claim 1 A resistive memory device structure, comprising: a switchable resistor comprising an oxide layer and an oxygen exchange layer between a pair of electrodes; a transistor coupled to the switchable resistor, the transistor comprising a gate and a channel between a source and a drain; and a ballast resistor in electrical series with the switchable resistor and the transistor source or drain, wherein the ballast resistor comprises a first material layer in contact with a second material layer, a thickness of the first material layer between the second material layer and the transistor source or drain, and a thickness of the second material layer between the first material layer and one of the electrodes, and wherein the first material layer comprises a first metal chalcogenide, and the second material layer comprises a second metal chalcogenide, different than the first metal chalcogenide. ### Claim 2 (depends on 1) The resistive memory device structure of claim 1, wherein the first metal chalcogenide comprises a first of Mo or W. ### Claim 3 (depends on 2) The resistive memory device structure of claim 2, wherein the second metal chalcogenide comprises a second of Mo or W. ### Claim 4 (depends on 1) The resistive memory device structure of claim 1, wherein the first metal chalcogenide comprises a different chalcogen than the second metal chalcogenide. ### Claim 5 (depends on 4) The resistive memory device structure of claim 4, wherein the first metal chalcogenide comprises a first of S or Se, and wherein the second metal chalcogenide comprises a second of S or Se. ### Claim 6 (depends on 1) The resistive memory device structure of claim 1, wherein the first material and the second material are of complementary conductivity type. ### Claim 7 (depends on 1) The resistive memory device structure of claim 1, wherein the first material comprises Mo and S, and the second material comprises W and Se. ### Claim 8 (depends on 1) The resistive memory device structure of claim 1, wherein the first and second material layers are between the one of the oxide layer or the oxygen exchange layer and one of the first or second electrodes. ### Claim 9 (depends on 1) The device of claim 1, wherein the channel comprises a first metal chalcogenide, and the source or drain comprises a second metal chalcogenide. ### Claim 10 (depends on 1) The system of claim 1, wherein the oxygen exchange layer comprises hafnium, tantalum, titanium, carbon, or tungsten. ### Claim 11 (depends on 1) The system of claim 1, wherein the oxide layer comprises a transition metal oxide. ### Claim 12 A system, comprising: a transistor structure comprising a channel, a source, a drain, and a gate; and a resistive memory structure coupled to the transistor source or drain, the resistive memory structure including a pair of electrodes with an oxide layer and an oxygen exchange layer therebetween, wherein the resistive memory structure further comprises a ballast resistor stack between the pair of electrodes, ballast resistor stack comprising first metal chalcogenide layer in contact with a second metal chalcogenide layer, wherein a thickness of the first metal chalcogenide is between one of the oxide layer or the oxygen exchange layer and one of the electrodes, and wherein a thickness of the second metal chalcogenide is between the first metal chalcogenide layer and the one of the oxide layer or the oxygen exchange layer. ### Claim 13 (depends on 12) The system of claim 12, wherein the ballast resistor stack displays negative differential resistance (NDR). ### Claim 14 (depends on 12) The system of claim 12, wherein the first metal chalcogenide has a first conductivity type and the second metal chalcogenide has a second, complementary, conductivity type. ### Claim 15 (depends on 12) The system of claim 12, wherein the first metal chalcogenide comprises a first of W and Mo, and a first of S and S, and the second metal chalcogenide comprises a second of W and Mo, and a second of S and Se. ### Claim 16 (depends on 1) The system of claim 1, wherein the first metal chalcogenide has a first conductivity type and the second metal chalcogenide has a second, complementary, conductivity type.