# US 10,871,719 B2 · EUV metal droplet catchers > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,871,719 B2 - Document ID: US10871719B2 - Status: Granted - Kind: B2 - Application number: 16/442,057 - Filed: 2019-06-14 - Published: 2020-02-20 - Granted: 2020-12-22 - Earliest claimed: 2018-08-17 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Taiwan Semiconductor Manufacturing Co., Ltd. - Inventors: Sheng-Ta Lin; Po-Chung Cheng; Li-Jui Chen; Shang-Chieh Chien - Web page: https://patentgrep.com/patent/US10871719B2 ## CPC - H05G 2/0025: {Systems for collecting the plasma generating material after the plasma generation} - G03F 7/70033: {by plasma extreme ultraviolet [EUV] sources} - G03F 7/70716: {Stages} - H05G: X-RAY TECHNIQUE (investigating or analysing materials by the use of X-rays G01N23/00; apparatus for X-ray photography G03B42/02; X-ray tubes H01J35/00; TV systems having X-ray input H04N5/321) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A droplet catcher includes a tube main body and baffles arranged along a length direction of the tube main body. ## Claims ### Claim 1 An extreme ultraviolet (EUV) lithography system, comprising: an EUV source to generate EUV radiation, wherein the EUV source includes a laser and a target material droplet generator; a mask stage configured to secure an EUV mask; a wafer stage configured to secure a semiconductor wafer; and an optical system designed to direct the EUV radiation from the EUV source to image a pattern defined on the EUV mask to the semiconductor wafer, wherein the EUV source further includes a metal droplet catcher that comprises a first end to receive metal droplets generated from the target material droplet generator and a second end opposite to the first end, and wherein the metal droplet catcher includes a baffle system including groove-form baffles formed on an inner wall of the baffle system along a length of the metal droplet catcher from the first end to the second end, and wherein a depth of the groove-form baffles gradually increases along the length of the metal droplet catcher. ### Claim 2 (depends on 1) The EUV lithography system of claim 1, wherein the groove-form baffles are arranged on a first side of the inner wall of the baffle system, and wherein a second side of the inner wall of the baffle system opposite to the first side of the inner wall of the baffle system does not have a groove-form baffle. ### Claim 3 (depends on 1) The EUV lithography system of claim 1, wherein the groove-form baffles extends in an inclined direction to make an acute angle with the inner wall of the baffle system. ### Claim 4 (depends on 3) The EUV lithography system of claim 3, wherein the acute angle is between 40 degrees and 70 degrees. ### Claim 5 (depends on 1) The EUV lithography system of claim 1, wherein the second end of the metal droplet catcher is closed. ### Claim 6 (depends on 1) The EUV lithography system of claim 1, wherein the second end of the metal droplet catcher is open. ### Claim 7 A metal droplet catcher, comprising: a tube main body that comprises a first end for receiving metal droplets and a second end opposite to the first end; and baffles arranged on a portion of an inner surface of the tube main body along a length of the tube main body from the first end to the second end, wherein the baffles are groove-form baffles, and wherein a depth of the groove-form baffles gradually increases along the length of the tube main body. ### Claim 8 (depends on 7) The metal droplet catcher of claim 7, wherein the second end of the tube main body is either: open and leads to a tube connecting to a target material droplet generator, or the second end of the tube main body is closed. ### Claim 9 (depends on 7) The metal droplet catcher of claim 7, wherein a cross section of the groove-form baffles perpendicular to the length of the tube main body has a curve form. ### Claim 10 (depends on 7) The metal droplet catcher of claim 7, wherein the metal droplets comprise tin droplets. ### Claim 11 (depends on 7) The metal droplet catcher of claim 7, wherein the metal droplet catcher comprises a heater to heat the metal droplet catcher. ### Claim 12 A metal droplet catcher tube, comprising: a main body that comprises a first end for receiving metal droplets and a second end opposite to the first end; and baffles arranged on a portion of an inner surface of the main body along a length of the main body from the first end to the second end, wherein the baffles are groove-form baffles, and wherein a depth of the groove-form baffles gradually increases along the length of the main body. ### Claim 13 (depends on 12) The metal droplet catcher tube of claim 12, wherein a remaining portion of the inner surface of the main body does not have a baffle. ### Claim 14 (depends on 12) The metal droplet catcher tube of claim 12, wherein the groove-form baffles extends in an inclined direction to make an acute angle with the inner surface of the main body. ### Claim 15 (depends on 14) The metal droplet catcher tube of claim 14, wherein the acute angle with the inner surface of the main body is between 5 degrees and 85 degrees. ### Claim 16 (depends on 14) The metal droplet catcher tube of claim 14, wherein the inclined direction of each groove-form baffle makes a same acute angle with the inner surface of the main body. ### Claim 17 (depends on 12) The metal droplet catcher tube of claim 12, wherein the baffles are arranged on a first side of the inner surface of the main body. ### Claim 18 (depends on 17) The metal droplet catcher tube of claim 17, wherein a second side of the inner surface of the main body opposite to the first side does not have a baffle. ### Claim 19 (depends on 18) The metal droplet catcher tube of claim 18, wherein the second side of the inner surface of the main body is smoothened to allow a flow of metal droplets. ### Claim 20 (depends on 12) The metal droplet catcher tube of claim 12, wherein the second end of the main body is open.