# US 10,871,507 B2 · Semiconductor device handler with chuck clamp interlock > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,871,507 B2 - Document ID: US10871507B2 - Status: Granted - Kind: B2 - Application number: 16/227,743 - Filed: 2018-12-20 - Published: 2020-06-25 - Granted: 2020-12-22 - Earliest claimed: 2018-12-20 - Assignees: Texas Instruments Incorporated - Applicants: Texas Instruments Incorporated - Inventors: Sonny Baskiñas Concepcion; Giovanni Hufana Nieva; Daniel Mendoza Ramirez, Jr. - Web page: https://patentgrep.com/patent/US10871507B2 ## CPC - G01R 1/0425: {Test clips, e.g. for IC's} - G01R 31/2601: {Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence)} - G01R 31/2865: {Holding devices, e.g. chucks; Handlers or transport devices (having contacts G01R31/2863)} - H10P 72/0432: {mainly by conduction} - H10P 72/1921: {characterised by substrate supports} - H10P 72/7608: {characterised by a plurality of separate clamping members, e.g. clamping fingers} - H10P 72/7618: {characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An apparatus includes a clip mounted to a base that pivots about a first pivot axis between a first position and a second position. An abutment surface of the clip is spaced from a path of a carrier structure when the clip is in the first position. The abutment surface engages the carrier structure to secure the carrier structure and a device to the apparatus when the clip is in the second clip position. A cam includes a first surface that pivots the clip to the first clip position when the cam is in the first cam position. The cam includes a second surface that extends into an opening of the base when the cam is in a first position to allow a stop plate pin to engage the cam to rotate the cam from the first position to a second position when a stop plate is installed. ## Claims ### Claim 1 A chuck apparatus, comprising: a clip mounted to a base and pivotal about a first pivot axis between a first clip position and a second clip position, the clip including an abutment surface spaced apart from the first pivot axis and spaced apart from a path of a carrier structure when the clip is in the first clip position, the abutment surface is positioned to engage the carrier structure to secure the carrier structure and an installed device under test (DUT) to the chuck apparatus when the clip is in the second clip position; a cam mounted to the base and pivotal about a second pivot axis between a first cam position and a second cam position, the cam including a first surface that engages the clip to pivot the clip to the first clip position when the cam is in the first cam position, and a second surface that extends into an opening of the base when the cam is in the first cam position; a first spring connected between the base and the cam to bias the cam toward the first cam position; and a second spring connected between the base and the clip to bias the clip toward the second clip position. ### Claim 2 (depends on 1) The chuck apparatus of claim 1, further comprising: a stop plate; and a pin that extends outward from a side of the stop plate to engage the second surface of the cam in the opening of the base to rotate the cam from the first cam position to the second cam position when the stop plate is installed in the chuck apparatus. ### Claim 3 (depends on 2) The chuck apparatus of claim 2, wherein the first spring is a helical spring with a first end engaging the base and a second end engaging the cam to bias the cam toward the first cam position. ### Claim 4 (depends on 3) The chuck apparatus of claim 3, wherein the second spring is a compression spring with a first end connected between the base and a second end connected to the clip to bias the clip toward the second clip position. ### Claim 5 (depends on 4) The chuck apparatus of claim 4, wherein the clip includes a tapered surface that engages the carrier structure to pivot the clip from the second clip position toward the first clip position when the chuck apparatus is translated toward the carrier structure. ### Claim 6 (depends on 2) The chuck apparatus of claim 2, wherein the second spring is a compression spring with a first end connected between the base and a second end connected to the clip to bias the clip toward the second clip position. ### Claim 7 (depends on 2) The chuck apparatus of claim 2, wherein the clip includes a tapered surface that engages the carrier structure to pivot the clip from the second clip position toward the first clip position when the chuck apparatus is translated toward the carrier structure. ### Claim 8 (depends on 1) The chuck apparatus of claim 1, wherein the first spring is a helical spring with a first end engaging the base and a second end engaging the cam to bias the cam toward the first cam position. ### Claim 9 (depends on 1) The chuck apparatus of claim 1, wherein the second spring is a compression spring with a first end connected between the base and a second end connected to the clip to bias the clip toward the second clip position. ### Claim 10 (depends on 1) The chuck apparatus of claim 1, wherein the clip includes a tapered surface that engages the carrier structure to pivot the clip from the second clip position toward the first clip position when the chuck apparatus is translated toward the carrier structure. ### Claim 11 (depends on 1) The chuck apparatus of claim 1, further comprising a thermal interface mounted to the base and including a side that contacts the installed DUT when the abutment surface of the clip engages the carrier structure. ### Claim 12 A system, comprising: a chuck apparatus, including a base, and a clip mounted to the base; a position control system configured to control a position of the chuck apparatus; a contactor with conductive probes to connect to an electronic device under test (DUT); and an electronic test circuit connected to the contactor to test the DUT; the clip being pivotal about a first pivot axis between a first clip position and a second clip position, the clip including an abutment surface spaced apart from the first pivot axis and spaced apart from a path of a carrier structure when the clip is in the first clip position, the abutment surface is positioned to engage the carrier structure to secure the carrier structure and an installed device under test (DUT) to the chuck apparatus when the clip is in the second clip position; the chuck apparatus including: a cam mounted to the base and pivotal about a second pivot axis between a first cam position and a second cam position, the cam including a first surface that engages the clip to pivot the clip to the first clip position when the cam is in the first cam position, and a second surface that extends into an opening of the base when the cam is in the first cam position, a first spring connected between the base and the cam to bias the cam toward the first cam position, and a second spring connected between the base and the clip to bias the clip toward the second clip position. ### Claim 13 (depends on 12) The system of claim 12, wherein the chuck apparatus includes a thermal interface mounted to the base and including a side that contacts the installed DUT when the abutment surface of the clip engages the carrier structure; and a thermal management system connected to the thermal interface to control thermal transfer between the thermal interface and the installed DUT. ### Claim 14 (depends on 13) The system of claim 13, further comprising: a stop plate; and a pin that extends outward from a side of the stop plate to engage the second surface of the cam in the opening of the base to rotate the cam from the first cam position to the second cam position when the stop plate is installed in the chuck apparatus. ### Claim 15 (depends on 12) The system of claim 12, further comprising: a stop plate; and a pin that extends outward from a side of the stop plate to engage the second surface of the cam in the opening of the base to rotate the cam from the first cam position to the second cam position when the stop plate is installed in the chuck apparatus. ### Claim 16 (depends on 12) The system of claim 12, wherein the clip includes a tapered surface that engages the carrier structure to pivot the clip from the second clip position toward the first clip position when the chuck apparatus is translated toward the carrier structure. ### Claim 17 (depends on 12) The system of claim 12, wherein the first spring is a helical spring with a first end engaging the base and a second end engaging the cam to bias the cam toward the first cam position. ### Claim 18 (depends on 12) The system of claim 12, wherein the second spring is a compression spring with a first end connected between the base and a second end connected to the clip to bias the clip toward the second clip position. ### Claim 19 A method, comprising: installing a stop plate in a chuck apparatus, including translating a pin of the stop plate into an opening of a base of the chuck apparatus to rotate a cam from a first cam position to a second cam position to allow a spring to rotate a clip from a first clip position to a second clip position; translating the chuck apparatus in a first direction toward a carrier structure to engage a tapered surface of the clip with the carrier structure to pivot the clip from the second clip position toward the first clip position; continuing translation of the chuck apparatus in the first direction to pivot the clip outward against a bias of the spring until the carrier structure clears an abutment surface of the clip; and pivoting the clip back to the second clip position using the spring after the carrier structure clears the abutment surface of the carrier structure to engage a step feature of the clip with the abutment surface to engage a thermal interface and the stop plate with a device under test (DUT) installed in the carrier structure. ### Claim 20 (depends on 19) The method of claim 19, further comprising: translating the chuck apparatus with the installed DUT and carrier structure toward a contactor to engage conductive features of the DUT with conductive probes of the contactor; testing the DUT using an electronic test circuit connected to the contactor; and controlling thermal transfer between the thermal interface and the installed DUT using a thermal management system connected to the thermal interface.