MOx-based gas sensor and manufacturing method thereof

A method, comprising:

• manufacturing a gas sensor for sensing gas species in an environment, the manufacturing including:
• forming a first working electrode over a substrate;
• forming a second working electrode over the substrate, at a distance from the first working electrode;
• forming an interconnection layer in electrical contact with the first and the second working electrodes, the interconnection layer being of a material configured to change its conductivity when reacting with said gas species,
• wherein forming the interconnection layer comprises depositing titanium oxide with a porosity between 40% and 60% in volume, the interconnection layer including a plurality of meso-pores and nano-pores, the meso-pores being in fluidic connection with an environment to receive the gas species and having at least one dimension in the range 5-30 nm, and being fluidically connected to the nano-pores which have at least one dimension in the range 1-5 nm.

A gas sensor for sensing a gas species in an environment, comprising:

• a substrate;
• a first working electrode on the substrate;
• a second working electrode on the substrate, at a distance from the first working electrode;
• an interconnection layer extending in contact with the first and the second working electrodes, configured to change its conductivity when reacting with the gas species, wherein the interconnection layer is of titanium oxide, has a porosity between 40% and 60% in volume and includes:
• a plurality of meso-pores configured to receive the gas species and having at least one dimension in the range 5-30 nm, and
• a plurality of nano-pores, having at least one dimension in the range 1-5 nm, the plurality of nano-pores being fluidly connected to the plurality of meso-pores.