# US 10,871,449 B2 · SERS sensor apparatus with passivation film > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,871,449 B2 - Document ID: US10871449B2 - Status: Granted - Kind: B2 - Application number: 16/074,368 - Filed: 2016-04-22 - Published: 2020-05-21 - Granted: 2020-12-22 - Earliest claimed: 2016-04-22 - Assignees: Hewlett-Packard Development Company, L.P. - Applicants: Hewlett-Packard Development Company, L.P. - Inventors: Zhizhang Chen; Chien-Hua Chen; James E Abbott - Web page: https://patentgrep.com/patent/US10871449B2 ## CPC - G01N 21/658: {enhancement Raman, e.g. surface plasmons} - G01N 21/05: Flow-through cuvettes (G01N21/09 takes precedence; handling fluid samples G01N1/10) - G01N 21/0332: {with temperature control (control of temperature G05D23/00; cryostats F17C3/08)} - G01N 2021/0346: {Capillary cells; Microcells} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract A method for forming a surface enhanced Raman spectroscopy (SERS) sensing apparatus may include providing a body having an internal microfluidic passage, the microfluidic passage having an interior surrounded by an interior surface, depositing a conformal inorganic passivation film onto the interior surface so as to continuously surround the interior by atomic layer deposition and positioning a SERS sensor in connection with the microfluidic passage after the depositing of the conformal inorganic film. ## Claims ### Claim 1 A method for forming a surface enhanced Raman spectroscopy (SERS) sensing apparatus, the method comprising: providing a body having an internal microfluidic passage, the microfluidic passage having an interior surrounded by an interior surface; depositing a conformal inorganic passivation film onto the interior surface so as to continuously surround the interior; and positioning a SERS sensor in connection with the microfluidic passage after the depositing of the conformal inorganic film. ### Claim 2 (depends on 1) The method of claim 1, wherein providing the body comprises: forming a first body portion, the first body portion comprising a groove; and securing a second body portion to the first body portion over the groove to cover the groove, wherein the first body portion and the second body portion form the interior surface of the microfluidic passage, wherein the conformal inorganic passivation film continuously extends across a junction of the first body portion and the second body portion. ### Claim 3 (depends on 1) The method of claim 1, wherein providing the body comprises three dimensionally printing the body with the internal microfluidic passage. ### Claim 4 (depends on 1) The method of claim 1, wherein the conformal inorganic passivation film comprises multiple layers having a collective thickness of at least 10 Angstroms and less than or equal to 20 Angstroms. ### Claim 5 (depends on 1) The method of claim 1, wherein the conformal inorganic passivation film is deposited by atomic layer deposition (ALD). ### Claim 6 (depends on 1) The method of claim 1, wherein the positioning of the SERS sensor comprises passing the SERS sensor through an opening in the body into the body and into connection with the microfluidic passage. ### Claim 7 (depends on 6) The method of claim 6 further comprising securing a lens across the opening after the positioning of the SERS sensor in connection with the microfluidic passage. ### Claim 8 (depends on 1) The method of claim 1, wherein the microfluidic passage extends between a fluid reservoir, having a dimension different than a corresponding dimension of the microfluidic passage and an interior with an interior surface, and the SERS sensor and wherein the conformal inorganic passivation film is deposited so as to continuously cover the interior surface of the fluid reservoir and to continuously extend from the fluid reservoir to the SERS sensor. ### Claim 9 (depends on 1) The method of claim 1, wherein the body comprises an inlet and an outlet in connection with the microfluidic passage, wherein the SERS sensor is positioned between the inlet and the outlet and wherein the conformal inorganic passivation film is deposited so as to extend on the interior surface of the microfluidic passage continuously from the inlet to the outlet. ### Claim 10 A surface enhanced Raman spectroscopy (SERS) sensing apparatus comprising: a body; a SERS sensor within the body; a microfluidic passage extending within the body to supply fluid to the sensor, the microfluidic passage having an interior surrounded by an interior surface; a conformal inorganic film on the interior surface of the microfluidic passage and continuously extending about the interior of the microfluidic passage. ### Claim 11 (depends on 10) The SERS sensing apparatus of claim 10, wherein the microfluidic passage is serpentine. ### Claim 12 (depends on 10) The SERS sensing apparatus of claim 10, wherein the SERS sensor is positioned on top of the conformal inorganic film. ### Claim 13 (depends on 10) The SERS sensing apparatus of claim 10, wherein the body comprises at least one of a polymer and a glass. ### Claim 14 (depends on 10) The SERS sensing apparatus of claim 10, wherein the body comprises an inlet and an outlet in connection with the microfluidic passage, wherein the SERS sensor is positioned between the inlet and the outlet and wherein the conformal inorganic passivation film extends on the interior surface of the microfluidic passage continuously from the inlet to the outlet. ### Claim 15 (depends on 10) The SERS sensing apparatus of claim 10, wherein the conformal inorganic passivation film comprises multiple layers having a collective thickness of at least 10 Angstroms and less than or equal to 20 Angstroms. ### Claim 16 (depends on 15) The SERS sensing apparatus of claim 15, wherein the body comprises: a first body portion, the first body portion comprising a groove; and a second body portion to the first body portion over the groove to cover the groove, wherein the first body portion and the second body portion form the interior surface of the microfluidic passage, wherein the conformal inorganic passivation film continuously extends across a junction of the first body portion and the second body portion. ### Claim 17 (depends on 10) The SERS sensing apparatus of claim 10, wherein the conformal inorganic film comprises at least one material selected from a group of materials consisting of HfO2, Al2O3, Ti2O3, Ta2O5, SiO2, Si3N4, ZrO2, Cr2O3, ZnO, SNO, TiN and TaN, ITO, zinc indium oxis (ZIO), zinc tin oxide (ZTO), indium gallium zinc oxide (IGZO), multicomponent oxides, multicomponent nitrides and transition metal oxides. ### Claim 18 (depends on 10) The SERS sensing apparatus of claim 10, wherein the conformal inorganic film comprises multiple single molecule thick layers. ### Claim 19 (depends on 10) The SERS sensing apparatus of claim 10, wherein the conformal inorganic film is directly coated upon the interior surface. ### Claim 20 A surface enhanced Raman spectroscopy (SERS) sensing apparatus comprising: a first body portion comprising: an inlet cavity; an outlet cavity; a groove extending between and interconnecting the inlet cavity and the outlet cavity; a second body portion secured to the first body portion so as to cover the groove; a conformal inorganic film continuously extending from the inlet cavity to the outlet cavity and continuously extending across a junction of the first body portion and the second body portion; and a SERS sensor on top of the conformal inorganic film.