# US 10,870,915 B2 · Deposition apparatus, method of forming thin film using the same, and method of manufacturing organic light emitting display apparatus

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- Number: US 10,870,915 B2
- Document ID: US10870915B2
- Status: Granted
- Kind: B2
- Application number: 16/024,626
- Filed: 2018-06-29
- Published: 2018-10-25
- Granted: 2020-12-22
- Earliest claimed: 2013-04-04
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Sun-Ho Kim; Myung-Soo Huh; Jeong-Ho Yi; Cheol-Rae Jo; Hyun-Woo Joo; Yong-Suk Lee
- Web page: https://patentgrep.com/patent/US10870915B2

## CPC

- C23C 14/564: {Means for minimising impurities in the coating chamber such as dust, moisture, residual gases}
- C23C 14/24: Vacuum evaporation
- C23C 16/4412: {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps}
- H10W 74/01: Manufacture or treatment
- H10K 71/16: using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A deposition apparatus configured to perform a deposition process on a substrate, the deposition apparatus including a chamber having an exhaust opening in a surface, a deposition source in the chamber configured to eject one or more deposition materials toward the substrate, a cooling plate corresponding to an inner surface of the chamber, at which the exhaust opening is formed, a refrigerator contacting the cooling plate, and a pump coupled to the exhaust opening.

## Claims

### Claim 1

A method of forming a thin film by performing a deposition process on a substrate using a deposition apparatus, the method comprising:
carrying the substrate into a chamber;
ejecting one or more deposition materials toward the substrate using a deposition source in the chamber; and
capturing the deposition materials remaining in the chamber using a cooling plate coupled to a refrigerator and corresponding to an inner surface of the chamber, at which an exhaust opening is formed,
wherein the cooling plate and the exhaust opening are formed in a same surface of the chamber and wherein the cooling plate is disposed around the exhaust opening in the chamber.

### Claim 2 (depends on 1)

The method of claim 1, wherein the deposition process is performed while moving the substrate or the deposition source.

### Claim 3 (depends on 1)

The method of claim 1, wherein a cooling material in the refrigerator is processed using a compressor.

### Claim 4

A method of manufacturing an organic light emitting display apparatus using a deposition apparatus, the method comprising forming at least one thin film in the organic light emitting display apparatus, wherein the forming of the at least one thin film comprises:
carrying a substrate into a chamber;
ejecting one or more deposition materials toward the substrate using a deposition source in the chamber; and
capturing the deposition materials remaining in the chamber using a cooling plate coupled to a refrigerator and corresponding to an inner surface of the chamber, at which an exhaust opening is formed,
wherein the cooling plate and the exhaust opening are formed in a same surface of the chamber and wherein the cooling plate is disposed around the exhaust opening in the chamber.

### Claim 5 (depends on 4)

The method of claim 4, wherein the organic light emitting display apparatus comprises a first electrode, an intermediate layer comprising an organic emission layer, a second electrode, and an encapsulation layer on the substrate, the encapsulation layer comprising at least one thin film.

### Claim 6 (depends on 5)

The method of claim 5, wherein the encapsulation layer comprises an organic layer and an inorganic layer the organic layer comprising the at least one thin film.