# US 10,870,913 B2 · Processing device, sputtering device, and collimator

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- Number: US 10,870,913 B2
- Document ID: US10870913B2
- Status: Granted
- Kind: B2
- Application number: 15/753,831
- Filed: 2016-12-19
- Published: 2018-08-23
- Granted: 2020-12-22
- Earliest claimed: 2016-03-14
- Assignees: Kabushiki Kaisha Toshiba
- Applicants: Kabushiki Kaisha Toshiba
- Inventors: Masakatsu Takeuchi; Shiguma Kato; Yasuhiro Aoyama; Takahiro Terada; Yoshinori Tokuda
- Web page: https://patentgrep.com/patent/US10870913B2

## CPC

- C23C 14/54: Controlling or regulating the coating process
- C23C 14/34: Sputtering
- C23C 14/35: by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)}
- H01J 37/3447: {Collimators, shutters, apertures}
- H10P 14/42: using a gas or vapour
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A processing device according to one embodiment includes an object placement unit, a source placement unit, a collimator, and a temperature adjusting unit. The object placement unit is configured to have an object arranged. The object placement unit is configured to have an object placed thereon. The source placement unit is arranged apart from the object placement unit and configured to have a particle source placed thereon, the particle source being capable of ejecting a particle toward the object. The collimator configured to be arranged between the object placement unit and the source placement unit, includes walls, and is provided with through holes formed by the walls and extending a direction from the object placement unit to the source placement unit. The temperature adjusting unit is configured to adjust a temperature of the collimator.

## Claims

### Claim 1

A film forming device comprising:
an object placement unit configured to have an object placed thereon;
a source placement unit arranged apart from the object placement unit and configured to have a particle source placed thereon, the particle source being capable of ejecting a particle toward the object;
a cryopump including a collimator and a temperature adjusting unit,
the collimator configured to be arranged between the object placement unit and the source placement unit, including a plurality of walls, and provided with a plurality of through holes formed by the plurality of walls and extending a direction from the object placement unit to the source placement unit, and
the temperature adjusting unit configured to decrease a temperature of the collimator to a temperature at which air is attached to surfaces of the walls; and
a container including an airtightly closable processing chamber, wherein
the object placement unit, the source placement unit, and the collimator are configured to be arranged in the processing chamber,
and
the cryopump is configured to cause the air in the processing chamber to be attached to the surfaces of the walls to make the processing chamber vacuum.

### Claim 2 (depends on 1)

The film forming device according to claim 1, wherein
the collimator is provided with a first opening, a second opening, and a first flow path passing through inside of the plurality of walls and connecting the first opening and the second opening, and
the temperature adjusting unit is configured to cause a heat medium to flow into the first flow path through the first opening, and to cool the heat medium flowing out through the second opening.

### Claim 3 (depends on 2)

The film forming device according to claim 2, wherein
the first flow path includes a first portion, and a plurality of second portions closer to the second opening than the first portion in a path of the first flow path is to the second opening and connected to the first portion.

### Claim 4 (depends on 2)

The film forming device according to claim 2, wherein
the temperature adjusting unit includes a first connecting portion configured to be connected to the first opening and a second connecting portion configured to be connected to the second opening, and is configured to cause the heat medium to flow into the first opening from the first connecting portion, and to cool the heat medium flowing out to the second connecting portion through the second opening,
the first connecting portion has an insulating property, and
the second connecting portion has an insulating property.

### Claim 5 (depends on 2)

The film forming device according to claim 2, wherein
the collimator is provided with a third opening, a fourth opening, and a second flow path passing through inside of the plurality of walls and connecting the third opening and the fourth opening, and
the temperature adjusting unit is configured to cause the heat medium to flow into the second flow path through the third opening, and to cool the heat medium flowing out through the fourth opening.

### Claim 6 (depends on 1)

The film forming device according to claim 1, wherein
the temperature adjusting unit includes a third connecting portion configured to be thermally connected with the collimator, and is configured to decrease the temperature of the collimator through the third connecting portion.

### Claim 7 (depends on 1)

The film forming device according to claim 1, further comprising a pump configured to suck the air in the processing chamber.

### Claim 8

The film forming device according to claim wherein
a distance between the collimator and the source placement unit is shorter than a distance between the collimator and the object placement unit.

### Claim 9 (depends on 1)

A sputtering device comprising the film forming device of claim 1.

### Claim 10 (depends on 2)

The film forming device according to claim 2, wherein
the first flow path includes a linear portion and a curved portion, the linear portion and the curved portion provided inside one of the walls,
the linear portion extends in a linear direction from the one of the walls to another of the walls, and
the curved portion extends in a direction intersecting with the linear direction.

### Claim 11 (depends on 2)

The film forming device according to claim 2, wherein
the first flow path includes a supply portion and a return portion, the supply portion and the return portion provided inside one of the walls and separated from each other in the one of the walls, the supply portion being closer to the first opening than to the second opening in the path of the first flow path, and the return portion being closer to the second opening than to the first opening in the path of the first flow path.

### Claim 12 (depends on 2)

The film forming device according to claim 2, wherein
the walls each includes a first part and a second part, the first part closer to the source placement unit than the second part is to the source placement unit, and the second part closer to the object placement unit than the first part is to the object placement unit, and
the density of the first flow path in the first part is higher than the density of the first flow path in the second part.

### Claim 13

A cryopump comprising:
a collimator to control a direction of a particle to be deposited on an object, the collimator including:
a frame provided with a first opening and a second opening; and
a plurality of walls, at least a part of the walls being positioned inside the frame, the walls forming a plurality of through holes and provided with a first flow path passing through inside of the walls and connecting the first opening and the second opening; and
a temperature adjusting unit configured to decrease a temperature of the walls to a temperature at which air is attached to surfaces of the walls.

### Claim 14 (depends on 13)

The cryopump according to claim 13, wherein
the first flow path includes a first portion, and a plurality of second portions closer to the second opening than the first portion in a path of the first flow path is to the second opening and connected to the first portion.

### Claim 15 (depends on 13)

The cryopump according to claim 13, wherein
the frame is provided with a third opening and a fourth opening, and
the plurality of walls is provided with a second flow path passing through inside of the plurality of walls and connecting the third opening and the fourth opening.