# US 10,870,737 B2 · Sensing material for gas sensors, method of fabricating the sensing material, gas sensor including the sensing material and method of fabricating the gas sensor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,870,737 B2 - Document ID: US10870737B2 - Status: Granted - Kind: B2 - Application number: 15/704,183 - Filed: 2017-09-14 - Published: 2018-09-13 - Granted: 2020-12-22 - Earliest claimed: 2017-03-13 - Assignees: Korea Institute of Science and Technology - Applicants: Korea Institute of Science and Technology - Inventors: Young Tae Byun; Sun-woo Choi; Dong Jin Lee - Web page: https://patentgrep.com/patent/US10870737B2 ## CPC - C08J 5/005: {Reinforced macromolecular compounds with nanosized materials, e.g. nanoparticles, nanofibres, nanotubes, nanowires, nanorods or nanolayered materials} - C08J 3/28: Treatment by wave energy or particle radiation - C08K 3/041: {Carbon nanotubes} - C08K 3/16: Halogen-containing compounds - G01N 27/127: {comprising nanoparticles} - C08J: WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H (working, e.g. shaping, of plastics B29) - C08K: Use of inorganic or non-macromolecular organic substances as compounding ingredients (paints, inks, varnishes, dyes, polishes, adhesives C09) - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract A sensing material for gas sensors including carbon nanotubes in which lanthanum fluoride (LaF3) nanoparticles are fixed, a method of fabricating the sensing material, a gas sensor including the sensing material, and a method of fabricating the gas sensor are provided. The gas sensor having an excellent response and excellent selectivity to F2 gas without any electrolytes may be provided using the sensing material. Also, the gas sensor can be useful in measuring a concentration of the F2 gas and minimizing power consumption because the gas sensor may be operated at room temperature without using a heater, and can be used for portable purposes because it is possible to miniaturize the gas sensor. ## Claims ### Claim 1 An F2 gas sensing material tar gas sensors comprising carbon nanotubes in which lanthanum fluoride (LaF3) nanoparticles in a powder form are fixed by a microwave treatment without using any electrolyte, wherein a weight ratio of the LaF3 nanoparticles and the carbon nanotubes is in a range of 9:1 to 1:9. ### Claim 2 (depends on 1) The F2 gas sensing material of claim 1, wherein the carbon nanotubes comprise single-walled carbon nanotubes (SWCNTs). ### Claim 3 (depends on 1) The F2 gas sensing material of claim 1, wherein the LaF3 nanoparticles are fixed to inner and/or outer walls of the carbon nanotubes. ### Claim 4 (depends on 1) A method of fabricating the F2 gas sensing material defined in claim 1, comprising: (1) mixing LaF3 nanoparticles in a powder form and carbon nanotubes; and (2) subjecting the mixture obtained in step (1) to the microwave treatment to fabricate the carbon nanotubes for sensing F2 gas in which the LaF3 nanoparticles are fixed without using any electrolyte: wherein a weight ratio of the LaF3 nanoparticles and the carbon nanotubes is in a range of 9:1 to 1:9. ### Claim 5 (depends on 4) The method of claim 4, further comprising: immersing the carbon nanotubes in which the LaF3 nanoparticles are fixed in step (2) in an organic solvent, followed by agitating, filtering and drying the carbon nanotubes. ### Claim 6 (depends on 5) The method of claim 5, wherein the organic solvent comprises one or two or more selected from the group consisting of dichlorobenzene, ortho-dichlorobenzene, N-methyl-2-pyrrolidinone, hexamethylphosphoramide, monochlorobenzene, N,N-dimethylformamide, dichloroethane, isopropyl alcohol, ethanol, methanol, chloroform, and toluene. ### Claim 7 (depends on 1) A gas sensor comprising the F2 gas sensing material defined in claim 1. ### Claim 8 (depends on 1) A method of fabricating the gas sensor comprising the F2 sensing material defined in claim 1, comprising: forming a network of the F2 gas sensing material on a substrate; and forming electrodes on the substrate on which the network is formed. ### Claim 9 (depends on 8) The method of claim 8, wherein the substrate comprises a silicon substrate. ### Claim 10 (depends on 8) The method of claim 8, wherein the substrate comprises a silicon substrate having a silicon oxide film formed on a surface thereof. ### Claim 11 (depends on 8) The method of claim 8, wherein the forming of the network of the F2 gas sensing material on the substrate is performed using one selected from a dipping method of dipping a substrate in a solution in which the F2 gas sensing material is dispersed and removing the substrate from the solution or a spraying method of spraying a solution in which the F2 gas sensing material is dispersed using an organic solvent. ### Claim 12 (depends on 11) The method of claim 11, wherein the solution in which the F2 gas sensing material is dispersed comprises one or two or more selected from the group consisting of dichlorobenzene, ortho-dichlorobenzene, N-methyl-2-pyrrolidinone, hexamethylphosphoramide, monochlorobenzene, N,N-dimethylformamide, dichloroethane, isopropyl alcohol, ethanol, methanol, chloroform, and toluene. ### Claim 13 (depends on 11) The method of claim 11, further comprising: irradiating the solution in which the F2 gas sensing material is dispersed with ultrasonic waves.