# US 10,870,175 B2 · Microfluidic flow-through elements and methods of manufacture of same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,870,175 B2 - Document ID: US10870175B2 - Status: Granted - Kind: B2 - Application number: 14/490,326 - Filed: 2014-09-18 - Published: 2015-05-14 - Granted: 2020-12-22 - Earliest claimed: 2013-09-18 - Assignees: Cytonome/St, LLC - Applicants: Cytonome/St, LLC - Inventors: Kristopher Scott Buchanan; Johnathan Charles Sharpe - Web page: https://patentgrep.com/patent/US10870175B2 ## CPC - B23K 26/388: Trepanning, i.e. boring by moving the beam spot about an axis - B05B 1/02: designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, {or having an outlet of particular shape}(B05B1/26, B05B1/28, B05B1/34 take precedence) - B23K 26/389: {of fluid openings, e.g. nozzles, jets} - B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM - B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D) ## Abstract Microfluidic flow-through elements and methods for forming and using the same, particularly, low cost, easily sterilized, disposable microfluidic flow-through elements may include an orifice region suitable, for example, for fluid jet formation (such as in a droplet sorter or flow cell) or sample injection or hydrodynamic focusing (such as in a non-droplet flow cytometer). Laser drilling, for example laser ablation, may be used to form an orifice region extending through an orifice wall section of a base substrate. The base substrate may be unitarily-formed by injection molding a polymeric material. The orifice region may be advantageously configured to form a predetermined geometry by controlling the characteristics of the ablating beam. ## Claims ### Claim 1 A process for forming a microfluidic nozzle tip, the process comprising: providing a polymeric base substrate having a flow path converging toward a closed end wall having an upstream surface and a downstream surface, the closed end wall having an end wall dimension defined between opposed flow path surfaces; aligning a laser relative to the polymeric base substrate; directing a beam from the laser in the flow-path direction, the beam from the laser having a corresponding cross-sectional beam dimension that is larger than the end wall dimension; and impinging the beam from the laser onto the upstream surface of the closed wall of the polymeric base substrate to form an orifice extending from the upstream surface to the downstream surface of the end wall of the polymeric base substrate, the orifice having a converging upstream orifice portion and a downstream orifice portion, the upstream orifice portion smoothly merges with the flow path at a transition region between the flow path and the upstream orifice portion. ### Claim 2 (depends on 1) The process of claim 1, wherein the downstream orifice portion is non-converging. ### Claim 3 (depends on 2) The process of claim 2, wherein the maximum cross-sectional area of the downstream orifice portion is less than or equal to the minimum cross-sectional area of the upstream orifice portion. ### Claim 4 (depends on 1) The process of claim 1, wherein the upstream orifice portion has a convergence angle that is substantially equal to a convergence angle of the flow path. ### Claim 5 (depends on 1) The process of claim 1, wherein the downstream orifice portion has a substantially constant cross-sectional area. ### Claim 6 (depends on 1) The process of claim 1, wherein the transition region between the flow path and the upstream orifice portion is formed without any discontinuities greater than 10 microns. ### Claim 7 (depends on 1) The process of claim 1, wherein the step of directing includes directing the beam from the laser in a downstream direction. ### Claim 8 (depends on 1) The process of claim 1, wherein the step of impinging the beam from the laser includes ablating the orifice and wherein the beam from the laser has a non-uniform transverse intensity profile and a transverse impinging footprint that is greater than a cross-section area of an exit orifice at a downstream end of the orifice. ### Claim 9 (depends on 1) The process of claim 1, wherein the step of impinging the beam from the laser includes using the laser to ablate the orifice, and wherein the downstream orifice portion of the orifice is formed as a substantially cylindrical channel having a length between approximately 70 microns to 150 microns and a diameter between approximately 60 microns to 100 microns. ### Claim 10 (depends on 1) The process of claim 1, wherein the step of impinging the beam from the laser includes removing material from the surface of the flow path upstream of the end wall. ### Claim 11 (depends on 1) The process of claim 1, wherein the step of impinging the beam from the laser forms the orifice without any discontinuities having a dimension greater than 10 microns. ### Claim 12 (depends on 1) The process of claim 1, further including: injecting a polymeric material into a mold to form the polymeric base substrate. ### Claim 13 (depends on 1) The process of claim 1, further including: forming the polymeric base substrate from a polymeric material having a low autofluorescence at a wavelength between approximately 450 nm to 550 nm. ### Claim 14 (depends on 1) The process of claim 1, further comprising: focusing the laser beam in a focal plane that is downstream or upstream of the closed end wall. ### Claim 15 A process for forming a microfluidic nozzle tip, the process comprising: providing a polymeric base substrate having a conical flow path surface converging from an upstream end toward a closed end wall at a downstream end, the closed end wall having an upstream surface, a downstream surface, and an end wall dimension defined between opposing conical surfaces; aligning a laser beam relative to the polymeric base substrate; focusing the laser beam in a focal plane that is downstream or upstream of the closed end wall; impinging the laser beam onto the upstream surface or the downstream surface of the closed end wall, the laser beam having a corresponding impinging cross-sectional beam dimension that is larger than the end wall dimension; and forming an orifice extending from the upstream surface to the downstream surface of the end wall with the laser beam, the orifice having an upstream orifice portion that converges in a downstream direction and smoothly merges with the conical flow path surface at a transition region, the orifice having a downstream orifice portion that is non-converging. ### Claim 16 (depends on 15) The process of claim 15, wherein the step of forming the orifice includes ablating the orifice and wherein the beam from the laser has a non-uniform transverse intensity profile and a transverse impinging footprint that is greater than a cross-section area of an exit orifice at the downstream end of the orifice. ### Claim 17 A process for forming a microfluidic nozzle tip, the process comprising: providing a polymeric base substrate having a flow path converging toward a closed end wall having an upstream surface and a downstream surface; aligning a laser relative to the polymeric base substrate; directing a beam from the laser in the flow-path direction; and impinging the beam from the laser onto the upstream surface of the closed wall of the polymeric base substrate to form an orifice extending from the upstream surface to the downstream surface of the end wall of the polymeric base substrate, the beam from the laser removing material from the upstream surface of the flow path relative to the end wall, the orifice having a converging upstream orifice portion and a downstream orifice portion, and the upstream orifice portion smoothly merges with the flow path at a transition region between the flow path and the upstream orifice portion. ### Claim 18 (depends on 17) The process of claim 17, wherein the downstream orifice portion is non-converging. ### Claim 19 (depends on 17) The process of claim 17, wherein the transition region between the flow path and the upstream orifice portion is formed without any discontinuities greater than 10 microns. ### Claim 20 (depends on 17) The process of claim 17, wherein the step of impinging the beam from the laser includes ablating the orifice and wherein the beam from the laser has a non-uniform transverse intensity profile and a transverse impinging footprint that is greater than a cross-section area of an exit orifice at a downstream end of the orifice. ### Claim 21 (depends on 17) The process of claim 17, wherein the step of impinging the beam from the laser includes using the laser to ablate the orifice, and wherein the downstream orifice portion of the orifice is formed as a substantially cylindrical channel having a length between approximately 70 microns to 150 microns and a diameter between approximately 60 microns to 100 microns. ### Claim 22 (depends on 17) The process of claim 17, wherein the step of impinging the beam from the laser forms the orifice without any discontinuities having a dimension greater than 10 microns.