# US 10,869,641 B2 · Manufacturing a collimator element > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,869,641 B2 - Document ID: US10869641B2 - Status: Granted - Kind: B2 - Application number: 16/561,206 - Filed: 2019-09-05 - Published: 2020-03-12 - Granted: 2020-12-22 - Earliest claimed: 2018-09-11 - Assignees: Siemens Healthcare GmbH - Applicants: Siemens Healthcare GmbH - Inventors: Thorsten Ergler; Vojislav Krstic - Web page: https://patentgrep.com/patent/US10869641B2 ## CPC - A61B 6/06: Diaphragms - A61B 6/032: {Transmission computed tomography [CT]} - A61B 6/4291: {the detector being combined with a grid or grating} - G21K 1/025: {using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation} - A61B 6/4241: {using energy resolving detectors, e.g. photon counting} - A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D) - G21K: HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES ## Abstract A method is disclosed for manufacturing a collimator element. The method includes applying a lithographic coating layer. The lithographic coating layer is then exposed using a grid mask. Exposure regions then correspond to a structure of the collimator element. Here, the structure of the collimator element is aligned on a common focus. The lithographic coating layer is then developed to give a pre-structure of the collimator element. Further, an X-ray absorbing layer is applied via cathode sputtering. At least the X-ray absorbing layer is then removed from regions of the pre-structure. A collimator element, a method for manufacturing a scattered-radiation collimator, a scattered-radiation collimator, a radiation detector and a CT device are also disclosed. ## Claims ### Claim 1 A method for manufacturing a collimator element, comprising at least the following steps: applying a lithographic coating layer; exposing the lithographic coating layer in exposure regions corresponding to a structure of the collimator element, the structure of the collimator element being aligned on a common focus; developing the lithographic coating layer to provide a pre-structure of the collimator element; applying an X-ray absorbing layer via cathode sputtering; and removing at least the X-ray absorbing layer from regions of the pre-structure, wherein during a repetition of the steps of the method, exposure regions offset from at least one previous exposure region are exposed, resulting in formation of a stepped structure of the collimator element, aligned on a common focus. ### Claim 2 (depends on 1) The method of claim 1, wherein the exposed regions are aligned on the common focus via a grid arrangement including a number of grid masks. ### Claim 3 (depends on 2) The method of claim 2, wherein at least one grid mask of the grid arrangement is exposed using a point light. ### Claim 4 (depends on 1) The method of claim 1, wherein the exposed regions are aligned on the common focus via a grid mask, the grid mask including shadowing regions including a shadowing width of less than 20 μm. ### Claim 5 (depends on 1) The method of claim 1, wherein the exposed regions are aligned on the common focus via a grid mask, the grid mask including shadowing regions, spaced by an exposure width of at most 400 μm. ### Claim 6 (depends on 1) The method of claim 1, wherein the X-ray absorbing layer includes tungsten as a constituent part. ### Claim 7 (depends on 1) The method of claim 1, wherein the X-ray absorbing layer is made of pure tungsten. ### Claim 8 (depends on 1) The method of claim 1, wherein the exposed regions are aligned on the common focus via a grid mask, the grid mask including shadowing regions including a shadowing width of less than 10 μm. ### Claim 9 (depends on 1) The method of claim 1, wherein the exposed regions are aligned on the common focus via a grid mask, the grid mask including shadowing regions, spaced by an exposure width of at most 100 μm. ### Claim 10 A collimator element, manufactured by at least: applying a lithographic coating layer; exposing the lithographic coating layer in exposure regions corresponding to a structure of the collimator element, the structure of the collimator element being aligned on a common focus; developing the lithographic coating layer to provide a pre-structure of the collimator element; applying an X-ray absorbing layer via cathode sputtering; and removing at least the X-ray absorbing layer from regions of the pre-structure, wherein during a repetition of the applying of the lithographic coating layer, exposing, developing, applying the X-ray absorbing layer, and removing, exposure regions offset from at least one previous exposure region are exposed, resulting in formation of a stepped structure of the collimator element, aligned on a common focus. ### Claim 11 (depends on 10) The collimator element of claim 10, including a number of X-ray absorbing layers structured via lithography and, aligned on a common focus, and formed from pure tungsten. ### Claim 12 (depends on 10) The collimator element of claim 10, including grid walls, a wall thickness of the grid walls being less than or equal to 100 μm. ### Claim 13 (depends on 12) The collimator element of claim 12, wherein the grid walls are spaced by a shaft width of at most 400 μm. ### Claim 14 A method for manufacturing a scattered-radiation collimator, comprising: providing a number of collimator elements, each of the collimator elements being manufactured by at least applying a lithographic coating layer, exposing the lithographic coating layer in exposure regions corresponding to a structure of the collimator element, the structure of the collimator element being aligned on a common focus, developing the lithographic coating layer to provide a pre-structure of the collimator element; applying an X-ray absorbing layer via cathode sputtering, and removing at least the X-ray absorbing layer from regions of the pre-structure, wherein during a repetition of the applying of the lithographic coating layer, exposing, developing, applying the X-ray absorbing layer, and removing, exposure regions offset from at least one previous exposure region are exposed, resulting in formation of a stepped structure of the collimator element, aligned on a common focus; and joining the number of collimator elements together, to form the scattered-radiation collimator. ### Claim 15 (depends on 14) The scattered-radiation collimator, including the number of collimator elements joined, of claim 14. ### Claim 16 (depends on 15) A radiation detector, comprising the scattered-radiation collimator of claim 15. ### Claim 17 (depends on 16) A CT device comprising the radiation detector of claim 16. ### Claim 18 A scattered-radiation collimator, manufactured by at least: providing a number of collimator elements, each of the collimator elements being manufactured by at least applying a lithographic coating layer, exposing the lithographic coating layer in exposure regions corresponding to a structure of the collimator element, the structure of the collimator element being aligned on a common focus, developing the lithographic coating layer to provide a pre-structure of the collimator element; applying an X-ray absorbing layer via cathode sputtering, and removing at least the X-ray absorbing layer from regions of the pre-structure, wherein during a repetition of the applying of the lithographic coating layer, exposing, developing, applying the X-ray absorbing layer, and removing, exposure regions offset from at least one previous exposure region are exposed, resulting in formation of a stepped structure of the collimator element, aligned on a common focus; and joining the number of collimator elements together, to form the scattered-radiation collimator. ### Claim 19 (depends on 18) The scattered-radiation collimator, including the number of collimator elements joined, of claim 18. ### Claim 20 (depends on 19) A radiation detector, comprising the scattered-radiation collimator of claim 19. ### Claim 21 (depends on 20) A CT device comprising the radiation detector of claim 20.