# US 10,865,473 B2 · Mask plate and process for manufacturing the same

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- Number: US 10,865,473 B2
- Document ID: US10865473B2
- Status: Granted
- Kind: B2
- Application number: 16/019,813
- Filed: 2018-06-27
- Published: 2019-07-04
- Granted: 2020-12-15
- Earliest claimed: 2018-01-03
- Assignees: Boe Technology Group Co., Ltd.
- Applicants: Boe Technology Group Co., Ltd.
- Inventors: Wenqi Liu; Zhongyuan Sun; Haibin Zhu; Jinxiang Xue
- Web page: https://patentgrep.com/patent/US10865473B2

## CPC

- C23C 14/042: {using masks}
- B05C 21/005: {Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20)}
- C23C 16/042: {using masks}
- H10K 71/166: {using selective deposition, e.g. using a mask}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08)
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

The present disclosure provides a mask plate and a method for manufacturing the same. The mask plate comprises a body provided with a plurality of openings, in which a first surface of the body is provided with cofferdams each surrounding a corresponding opening, and each cofferdam is configured to confine a diffusion range of a material deposited on a substrate through the opening. In the present disclosure, by providing, on a surface of the body of the mask plate, cofferdams each surrounding edges of each corresponding opening, the cofferdams can effectively prevent the deposition material from depositing into an invalid region, thus CVD shadow can be reduced and the packaging effect can be improved in the process of film deposition or evaporation by chemical vapor deposition (CVD).

## Claims

### Claim 1

A mask plate, comprising a body provided with a plurality of openings, wherein a first surface of the body is provided with cofferdams each surrounding a corresponding opening of the plurality of openings, and each of the
cofferdams is configured to confine a diffusion range of a material deposited on a substrate through the corresponding openings;
the cofferdams are made of polyimide or polystyrene;
a height of each of the cofferdams is greater than 0 mm and less than or equal to 0.1 mm, and a thickness of a sidewall of each of the cofferdams is greater than 1 mm and less than or equal to 3 mm;
each of the plurality of openings is surrounded by one of the cofferdams; and
a gap between a bottom surface of each of the cofferdams and a top surface of the substrate; and
an enclosed gap between any two adjacent cofferdams between the bottom surface of the body and the top surface of the substrate.

### Claim 2 (depends on 1)

The mask plate according to claim 1, wherein an inner wall of each of the cofferdams is flush with an inner wall of the corresponding opening.

### Claim 3 (depends on 1)

The mask plate according to claim 1, wherein the cofferdams are made of a flexible material.

### Claim 4 (depends on 2)

The mask plate according to claim 2, wherein the cofferdams are made of a flexible material.

### Claim 5 (depends on 1)

The mask plate according to claim 1, wherein the mask plate is a flexible mask plate.

### Claim 6 (depends on 1)

The mask plate according to claim 1, wherein the body is made of a flexible material.

### Claim 7

A method for manufacturing a mask plate, comprising forming cofferdams on a first surface of a body provided with a plurality of openings, wherein each cofferdam is configured to surround a corresponding opening of the plurality of openings and confine a diffusion range of a material deposited on a substrate through the opening;
the cofferdams are made of polyimide or polystyrene;
a height of each of the cofferdams is greater than 0 mm and less than or equal to 0.1 mm, and a thickness of a sidewall of each cofferdam is greater than 1 mm and less than or equal to 3 mm;
each of the plurality of openings is surrounded by one of the cofferdams; and
a gap between a bottom surface of each of the cofferdams and a top surface of the substrate; and
an enclosed gap between any two adjacent cofferdams between the bottom surface of the body and the top surface of the substrate.

### Claim 8 (depends on 7)

The method according to claim 7, wherein forming the cofferdams comprises forming an inner wall of each of the cofferdams to be flush with an inner wall of the corresponding opening.

### Claim 9 (depends on 7)

The method according to claim 7, further comprising, prior to forming the cofferdams on the first surface of the body provided with the plurality of openings, forming the body provided with the plurality of openings using a flexible material.

### Claim 10 (depends on 7)

The method according to claim 7, wherein forming the cofferdams comprises forming the cofferdams using a flexible material.

### Claim 11 (depends on 7)

The method according to claim 7, wherein forming the cofferdams comprises:
forming a polyimide layer on the first surface of the body provided with the plurality of openings; and
laser cutting or etching the polyimide layer, so as to form the cofferdams by a remaining portion of the polyimide layer.

### Claim 12 (depends on 11)

The method according to claim 11, wherein forming the polyimide layer on the first surface of the body provided with the plurality of openings comprises forming the polyimide layer on the first surface of the body provided with the plurality of openings through coating or ink jet.

### Claim 13 (depends on 7)

The method according to claim 7, wherein forming the cofferdams comprises:
forming a polystyrene layer on the first surface of the body provided with the plurality of openings;
patterning the polystyrene layer to form a plurality of columnar structures spaced apart from each other; and
laser cutting or etching a part of the columnar structures, so as to form the cofferdams by a remaining part of the columnar structures.

### Claim 14 (depends on 13)

The method according to claim 13, wherein patterning the polystyrene layer to form the plurality of columnar structures spaced apart from each other comprises patterning the polystyrene layer to form the plurality of columnar structures spaced apart from each other through developing, exposing, or etching.

### Claim 15 (depends on 13)

The method according to claim 13, wherein a width of each columnar structure is greater than 0 mm and less than or equal to 0.1 mm, and an interval between two adjacent columnar structures is greater than 0 mm and less than or equal to 0.1 mm.

### Claim 16 (depends on 1)

The mask plate according to claim 1, wherein the cofferdams are made of a different material than the body.

### Claim 17 (depends on 7)

The method according to claim 7, wherein the cofferdams are made of a different material than the body.

### Claim 18 (depends on 1)

The mask plate according to claim 1, wherein each of the cofferdams is a continuous ring.