# US 10,865,443 B2 · Optical detection for bio-entities > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,865,443 B2 - Document ID: US10865443B2 - Status: Granted - Kind: B2 - Application number: 16/403,873 - Filed: 2019-05-06 - Published: 2019-08-22 - Granted: 2020-12-15 - Earliest claimed: 2013-03-14 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Taiwan Semiconductor Manufacturing Company, Ltd. - Inventors: Allen Timothy Chang; Yi-Hsien Chang; Chun-Ren Cheng - Web page: https://patentgrep.com/patent/US10865443B2 ## CPC - C12Q 1/6869: Methods for sequencing - B01F 33/3021: {the components to be mixed being combined in a single independent droplet, e.g. these droplets being divided by a non-miscible fluid or consisting of independent droplets} - B01F 33/3031: using electro-hydrodynamic [EHD] or electro-kinetic [EKI] phenomena to mix or move the fluids - B01L 3/502707: {characterised by the manufacture of the container or its components} - B01L 3/502792: {for moving individual droplets on a plate, e.g. by locally altering surface tension} - G01N 21/05: Flow-through cuvettes (G01N21/09 takes precedence; handling fluid samples G01N1/10) - G01N 21/6428: {Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" (in vivo A61B5/00; immunoassay G01N33/53)} - G01N 27/44721: {by optical means} - G01N 27/44791: {Microapparatus (sample containers with integrated microfluidic structures B01L3/5027)} - B01L 2300/0654: Lenses; Optical fibres - B01L 2300/0819: Microarrays; Biochips - B01L 2300/0867: Multiple inlets and one sample wells, e.g. mixing, dilution - B01L 2300/089: Virtual walls for guiding liquids - B01L 2300/165: Specific details about hydrophobic, oleophobic surfaces - B01L 2300/168: Specific optical properties, e.g. reflective coatings - B01L 2400/0427: Electrowetting - G01N 2021/0325: {Cells for testing reactions, e.g. containing reagents} - G01N 2021/058: {Flat flow cell} - G01N 2021/6482: {Sample cells, cuvettes} - G01N 2201/08: Optical fibres; light guides - G02B 6/122: Basic optical elements, e.g. light-guiding paths - C12Q: MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS (immunoassay G01N33/53); COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES - B01F: MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING (mixing paints B44D3/06) - B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract An integrated semiconductor device for manipulating and processing bio-entity samples and methods are described. The device includes a lower substrate, at least one optical signal conduit disposed on the lower substrate, at least one cap bonding pad disposed on the lower substrate, a cap configured to form a capped area, and disposed on the at least one cap bonding pad, a fluidic channel, wherein a first side of the fluidic channel is formed on the lower substrate and a second side of the fluidic channel is formed on the cap, a photosensor array coupled to sensor control circuitry, and logic circuitry coupled to the fluidic control circuitry, and the sensor control circuitry. ## Claims ### Claim 1 An integrated circuit device comprising: an optical signal conduit disposed on a first semiconductor substrate; a surface treated structure disposed over the first semiconductor substrate, the surface treated structure in communication with the optical signal conduit to receive an optical signal from the optical signal conduit; a cap configured to form a capped area, wherein the optical signal conduit extends from outside the capped area to inside the capped area, wherein the surface treated structure is disposed within the capped area; and a fluidic channel, wherein a first side of the fluidic channel is formed on the first semiconductor substrate and a second side of the fluidic channel is formed on the cap, the cap being coupled to the first semiconductor substrate. ### Claim 2 (depends on 1) The device of claim 1, further comprising a photosensor array disposed on the first semiconductor substrate, the photosensor array operable to detect an emission occurring on the surface treated structure. ### Claim 3 (depends on 2) The device of claim 2, further comprising a logic circuitry configured to receive a signal from the photosensor array, the logic circuitry configured to process the signal. ### Claim 4 (depends on 3) The device of claim 3, further comprising an interlayer dielectric layer disposed on the first semiconductor substrate, and wherein the logic circuitry is disposed within the interlayer dielectric layer. ### Claim 5 (depends on 4) The device of claim 4, wherein the cap includes a second semiconductor substrate that is bonded to the first semiconductor substrate via a bonding pad disposed over the interlayer dielectric layer. ### Claim 6 (depends on 5) The device of claim 5, wherein a portion of the optical signal conduit is disposed between the interlayer dielectric layer and the bonding pad. ### Claim 7 (depends on 1) The device of claim 1, further comprising a plurality of electrodes disposed over the first semiconductor substrate, the plurality of electrodes operable to control a movement of a fluid through the fluidic channel. ### Claim 8 An integrated semiconductor device comprising: an optical signal conduit disposed on a substrate; a non-transparent cap structure disposed over the optical signal conduit and defining a capped area above the substrate, wherein the optical signal conduit extends from outside the capped area to inside the capped area; a surface treated area with receptors disposed within the capped area and configured to receive an optical signal from the optical signal conduit; a fluidic channel, wherein a bottom surface of the fluidic channel is formed on the substrate and a top surface of the fluidic channel is formed at the capped area; and a photodetector disposed on the substrate and configured to detect an emission occurring on the surface treated area. ### Claim 9 (depends on 8) The device of claim 8, wherein the receptors of the surface treated area are configured to interact with a fluid disposed within the fluidic channel, and wherein the receptors interactions with the fluid causes the emission, and wherein the emission is a light signal. ### Claim 10 (depends on 8) The device of claim 8, wherein there are no color filters disposed over the photodetector. ### Claim 11 (depends on 8) The device of claim 8, further comprising an interlayer dielectric layer disposed over the substrate, and wherein the photodetector is disposed over the interlayer dielectric layer. ### Claim 12 (depends on 8) The device of claim 8, further comprising a material layer disposed over and physically contacting the photodetector, the material layer directly under the treated surface area, and wherein the material layer is selected from the group consisting of an oxide material layer and an anti-reflective coating material layer. ### Claim 13 (depends on 8) The device of claim 8, further comprising: a plurality of electrodes disposed over the substrate, the plurality of electrodes operable to control a movement of a fluid through the fluidic channel; and a hydrophobic coating disposed on the plurality of electrodes and lining the fluidic channel. ### Claim 14 (depends on 8) The device of claim 8, wherein the optical signal conduit includes a grating coupler. ### Claim 15 A method comprising: transporting a sample through a fluidic channel to a surface treatment area, wherein one side of the fluidic channel is provided on a substrate; and detecting a photonic signal, the photonic signal being enhanced by an interaction of the sample and the surface treatment area. ### Claim 16 (depends on 15) The method of claim 15, further comprising transmitting light to the surface treatment area through an optical signal conduit disposed on the substrate. ### Claim 17 (depends on 15) The method of claim 15, wherein the transporting of the sample through the fluidic channel to the surface treatment area occurs via an electrowetting effect. ### Claim 18 (depends on 15) The method of claim 15, furthering comprising interpreting a characteristic of the photonic signal to determine a biochemical reaction. ### Claim 19 (depends on 18) The method of claim 18, wherein the characteristic is selected from the group consisting of color and frequency. ### Claim 20 (depends on 15) The method of claim 15, further comprising mixing the sample with a reagent in the fluidic channel.