Upper-layer film forming composition and method for producing a phase-separated pattern
AssigneeNissan Chemical Corporation
InventorsRyuta Mizuochi, Yasunobu Someya, Hiroyuki Wakayama, Rikimaru Sakamoto
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Abstract
An overlay film-forming composition used to cause phase separation to a block copolymer-containing layer formed on a substrate, the composition including: (A) a copolymer that includes (a) a unit structure derived from maleimide structure and a unit structure derived from styrene structure; and (B) an ether compound having 8-16 carbon atoms as a solvent. The overlay film-forming composition exhibits good solubility with respect to a hydrophobic solvent, and is able to induce vertical alignment of a block copolymer without causing dissolution, swelling, and the like of the block copolymer-containing layer formed on the substrate.
Claims14
A composition, comprising:
- an upper-layer that is present directly on a layer comprising a block copolymer that is formed on a substrate, the upper layer including:
- (A) a random copolymer comprising (a) a unit structure derived from maleimide structure and a unit structure derived from styrene structure;
- and
- (B) an ether compound as a solvent, the ether compound represented by the following formula (6):
- A1-O-A2 Formula (6)
- wherein each of A1 and A2 independently represents a linear, branched, or cyclic saturated alkyl group having 1 to 15 carbon atoms and being optionally substituted, with the proviso that the ether compound has 8 to 16 carbon atoms;
- wherein
- the layer comprising the block copolymer has domains of the block copolymer that are oriented vertically;
- and the upper-layer is in the form of an upper-layer film, which is configured for causing phase separation and inducing reorientation of the block copolymer such that the domains of the block copolymer that are oriented vertically are present on the surface of the substrate without dissolving or swelling the layer comprising the block copolymer formed on the substrate, and
- the upper-layer film is soluble in a hydrophobic solvent and the block copolymer is insoluble in the hydrophobic solvent.
Dependencies are inferred from the claim text.