# US 10,865,141 B2 · Synthetic quartz glass lid precursor, synthetic quartz glass lid, and preparation methods thereof

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- Number: US 10,865,141 B2
- Document ID: US10865141B2
- Status: Granted
- Kind: B2
- Application number: 15/883,575
- Filed: 2018-01-30
- Published: 2018-08-02
- Granted: 2020-12-15
- Earliest claimed: 2017-01-31
- Assignees: Shin-Etsu Chemical Co., Ltd.
- Applicants: Shin-Etsu Chemical Co., Ltd.
- Inventors: Harunobu Matsui; Daijitsu Harada; Masaki Takeuchi
- Web page: https://patentgrep.com/patent/US10865141B2

## CPC

- C03C 27/046: {of metals, metal oxides or metal salts only}
- C03B 19/066: {for the production of quartz or fused silica articles (other processes specially adapted for the production of quartz or fused silica articles C03B20/00)}
- C03B 20/00: Processes specially adapted for the production of quartz or fused silica articles {, not otherwise provided for (C03B19/01, C03B19/066, C03B19/106, C03B19/12, C03B19/14, C03B37/00 take precedence)}
- C03C 3/06: with more than 90% silica by weight, e.g. quartz {(C03C3/045 takes precedence)}
- C03C 17/10: by deposition from the liquid phase
- C03C 17/40: all coatings being metal coatings
- C03C 21/008: {in solid phase, e.g. using pastes, powders}
- C03C 27/00: Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing (C03C17/00 takes precedence; layered structures comprising at least one glass sheet B32B17/00; wired glass C03B; joining glass to ceramics C04)
- C03C 27/048: {consisting of an adhesive specially adapted for that purpose}
- C04B 37/045: {characterised by the interlayer used (C04B37/047 takes precedence)}
- C03C 2217/256: Ag
- C03C 2217/268: Other specific metals
- C03C 2217/27: Mixtures of metals, alloys
- C03C 2217/77: Coatings having a rough surface
- C04B 2235/5454: nanometer sized, i.e. below 100 nm
- C04B 2237/125: based on noble metals, e.g. silver
- C04B 2237/343: Alumina or aluminates
- C04B 2237/366: Aluminium nitride
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03B: MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE

## Abstract

A synthetic quartz glass lid for use in optical device packages is prepared by furnishing a synthetic quartz glass lid precursor comprising a synthetic quartz glass substrate (1) and a metal or metal compound film (2), and forming a metal base adhesive layer (3) on the metal or metal compound film (2). The metal or metal compound film contains Ag, Bi, and at least one element selected from P, Sb, Sn and In.

## Claims

### Claim 1

A synthetic quartz glass lid precursor comprising a synthetic quartz glass substrate and a metal or metal compound film on one major surface thereof, the metal or metal compound film containing silver, bismuth, and at least one element selected from the group consisting of phosphorus, antimony, tin and indium, wherein
the metal or metal compound film has a surface roughness (Ra) of up to 2 nm.

### Claim 2 (depends on 1)

The lid precursor of claim 1 wherein the metal or metal compound film is formed on an outer peripheral portion of the major surface of the substrate.

### Claim 3 (depends on 1)

The lid precursor of claim 1 wherein the metal or metal compound film has a thickness of 1 to 20 μm.

### Claim 4 (depends on 1)

The lid precursor of claim 1 wherein the metal or metal compound film has a flatness of up to 10 μm on its surface.

### Claim 5 (depends on 1)

The lid precursor of claim 1 which is used in optical device packages.

### Claim 6 (depends on 1)

A synthetic quartz glass lid comprising the lid precursor of claim 1, and a metal base adhesive layer on the surface of the metal or metal compound film.

### Claim 7 (depends on 6)

The lid of claim 6 wherein the metal base adhesive layer contains at least one element selected from the group consisting of gold, silver, copper, palladium, tin, tungsten, and tellurium.

### Claim 8 (depends on 1)

A method for preparing the synthetic quartz glass lid precursor of claim 1, comprising the steps of:
coating one major surface of a synthetic quartz glass substrate with a metal paste comprising silver, bismuth, and at least one element selected from the group consisting of phosphorus, antimony, tin and indium in a dispersing medium, and
heating and sintering the metal paste coating to form the metal or metal compound film on the substrate.

### Claim 9 (depends on 8)

The method of claim 8 wherein the metal paste has a silver content of 65 to 95% by weight.

### Claim 10 (depends on 8)

A method for preparing a synthetic quartz glass lid from the synthetic quartz glass lid precursor prepared by the method of claim 8,
the method comprising the step of coating the surface of the metal or metal compound film with another metal paste to form a metal base adhesive layer thereon.

### Claim 11 (depends on 10)

The method of claim 10 wherein the other metal paste contains at least one element selected from the group consisting of gold, silver, copper, palladium, tin, tungsten, and tellurium, and a dispersing medium.