# US 10,865,101 B2 · Discharge circuits, devices and methods > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,865,101 B2 - Document ID: US10865101B2 - Status: Granted - Kind: B2 - Application number: 16/188,315 - Filed: 2018-11-13 - Published: 2019-05-16 - Granted: 2020-12-15 - Earliest claimed: 2014-04-14 - Assignees: Skyworks Solutions, Inc. - Applicants: Skyworks Solutions, Inc. - Inventors: Jerod F. Mason; Dylan Charles Bartle; David Scott Whitefield; David T. Petzold; Dogan Gunes; Paul T. Dicarlo - Web page: https://patentgrep.com/patent/US10865101B2 ## CPC - B81B 7/0022: {Protection against electrostatic discharge (circuit arrangements for protecting electronic switching circuits used for pulse technique against overcurrent or overvoltage H03K17/08; electrostatic discharge protection for electronic semiconductor circuits H10D89/60)} - B81B 7/02: containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) - B81C 1/00341: {Processes for manufacturing microsystems not provided for in groups B81C1/00023 - B81C1/00261} - G01P 15/135: by making use of contacts which are actuated by a movable inertial mass - H01H 59/0009: {making use of micromechanics} - B81B 2201/014: having a cantilever fixed on one side connected to one or more dimples - B81B 2201/0235: Accelerometers - B81B 2201/0242: Gyroscopes - B81B 2201/0271: Resonators; ultrasonic resonators - G01C 19/56: Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) - H01H: ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES (contact cables H01B7/10; electrolytic self-interrupters H01G9/18; emergency protective circuit arrangements H02H; switching by electronic means without contact-making H03K17/00) - G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S) ## Abstract Discharge circuits, devices and methods. In some embodiments, a MEMS device can include a substrate and an electromechanical assembly implemented on the substrate. The MEMS device can further include a discharge circuit implemented relative to the electromechanical assembly. The discharge circuit can be configured to provide a preferred arcing path during a discharge condition affecting the electromechanical assembly. The MEMS device can be, for example, a switching device, a capacitance device, a gyroscope sensor device, an accelerometer device, a surface acoustic wave (SAW) device, or a bulk acoustic wave (BAW) device. The discharge circuit can include a spark gap assembly having one or more spark gap elements configured to facilitate the preferred arcing path. ## Claims ### Claim 1 A switching device comprising: a substrate; a switching assembly implemented on the substrate and including a first electrode having a beam with a contact pad and a second electrode, the switching assembly configured to be in a first state in which the contact pad is disengaged from the second electrode or in a second state in which the contact pad is engaged with the second electrode, the switching assembly further configured to provide activation when a sufficient voltage difference exists between the beam and a gate, the activation resulting in the contact pad of the first electrode engaging the second electrode; and a discharge circuit including a first spark element electrically connected with the first electrode and a second spark element electrically connected with the second electrode, the first and second spark elements arranged in a non-contacting manner with each other and configured such that an electrical discharge arc is directed between the first and second spark elements instead of being directed through the contact pad. ### Claim 2 (depends on 1) The switching device of claim 1 wherein the first spark element is implemented as a part of the beam of the first electrode. ### Claim 3 (depends on 2) The switching device of claim 2 wherein the first spark element is implemented on an underside of the beam, and the second spark element is oriented to face the first spark element. ### Claim 4 (depends on 3) The switching device of claim 3 wherein the second spark element is implemented on an upper surface of the second electrode. ### Claim 5 (depends on 2) The switching device of claim 2 wherein the first spark element is implemented on a side of the beam, and the second spark element is oriented to face the first spark element. ### Claim 6 (depends on 5) The switching device of claim 5 wherein the second spark element is implemented on a side of a conductor structure electrically connected to the second electrode. ### Claim 7 (depends on 1) The switching device of claim 1 wherein the first spark element includes one or more spark gap elements and the second spark element includes one or more spark gap elements. ### Claim 8 (depends on 7) The switching device of claim 7 wherein each of the one or more spark gap elements of the first and second conductors includes a shaped conductive feature. ### Claim 9 (depends on 8) The switching device of claim 8 wherein the one or more shaped conductive features of one of the first and second conductors is/are laterally offset from the one or more shaped conductive features of the other conductor. ### Claim 10 (depends on 1) The switching device of claim 1 wherein the first and second spark elements are configured such that the electrical discharge arc through the first and second spark elements occurs at a first potential difference between the first and second electrodes, the first potential difference being lower than a potential difference needed to trigger an electrical arc through the contact pad when the beam is in the first state. ### Claim 11 (depends on 10) The switching device of claim 10 wherein the first and second spark elements are further configured so that the first potential difference is lower than a lowest potential difference needed to trigger an electrical arc through the contact pad in a range of motion of the contact pad relative to the second electrode. ### Claim 12 (depends on 1) The switching device of claim 1 wherein the first and second spark elements are configured to provide discharge protection during hot switching operations as well as during cold switching operations involving the first and second electrodes. ### Claim 13 (depends on 1) The switching device of claim 1 wherein the gate is coupled to a ground such that the activation results in at least some of charge associated with the sufficient voltage difference between the beam and the gate to be dissipated to the ground. ### Claim 14 (depends on 1) The switching device of claim 1 wherein the switching device is implemented in a microelectromechanical systems (MEMS) format. ### Claim 15 A packaged module comprising: a packaging substrate configured to receive a plurality of components; and a switching device implemented on the packaging substrate, the switching device including a switching assembly implemented on the substrate and including a first electrode having a beam with a contact pad and a second electrode, the switching assembly configured to be in a first state in which the contact pad is disengaged from the second electrode or in a second state in which the contact pad is engaged with the second electrode, the switching assembly further configured to provide activation when a sufficient voltage difference exists between the beam and a gate, the activation resulting in the contact pad of the first electrode engaging the second electrode, the switching device further including a discharge circuit having a first spark element electrically connected with the first electrode and a second spark element electrically connected with the second electrode, the first and second spark elements arranged in a non-contacting manner with each other and configured such that an electrical discharge arc is directed between the first and second spark elements instead of being directed through the contact pad. ### Claim 16 (depends on 15) The packaged module of claim 15 wherein the switching device is implemented in a microelectromechanical systems (MEMS) format. ### Claim 17 (depends on 15) The packaged module of claim 15 wherein the switching device is configured to be capable of providing radio-frequency switching functionality. ### Claim 18 An electronic device comprising: an integrated circuit for processing a signal; and a switch circuit configured to support the processing of the signal, the switch circuit including a switching device having a switching assembly with a first electrode having a beam with a contact pad and a second electrode, the switching assembly configured to be in a first state in which the contact pad is disengaged from the second electrode or in a second state in which the contact pad is engaged with the second electrode, the switching assembly further configured to provide activation when a sufficient voltage difference exists between the beam and a gate, the activation resulting in the contact pad of the first electrode engaging the second electrode, the switching device further including a discharge circuit having a first spark element electrically connected with the first electrode and a second spark element electrically connected with the second electrode, the first and second spark elements arranged in a non-contacting manner with each other and configured such that an electrical discharge arc is directed between the first and second spark elements instead of being directed through the contact pad. ### Claim 19 (depends on 18) The electronic device of claim 18 further comprising an antenna configured to support either or both of receive and transmit operations. ### Claim 20 (depends on 19) The electronic device of claim 19 wherein the electronic device is a wireless device.