# US 10,864,730 B2 · Electrohydrodynamic printing apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,864,730 B2 - Document ID: US10864730B2 - Status: Granted - Kind: B2 - Application number: 16/585,980 - Filed: 2019-09-27 - Published: 2020-06-18 - Granted: 2020-12-15 - Earliest claimed: 2018-12-13 - Assignees: Enjet Co. Ltd. - Applicants: Enjet Co. Ltd. - Inventors: Do Young Byun; Vu Dat Nguyen; Kwangsun Jeon; Yong Hee Jang - Web page: https://patentgrep.com/patent/US10864730B2 ## CPC - B41J 2/06: by electric or magnetic field - B41J 2/14314: {Structure of ink jet print heads with electrostatically actuated membrane} - B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS ## Abstract Disclosed is an electrohydrodynamic printing apparatus including: a nozzle configured to discharge liquid toward a substrate; a voltage applier configured to form an electric field between the nozzle and the substrate; and a laser beam emitter configured to emit a laser beam toward a position to which liquid is discharged on the substrate. Thus, it is possible to accurately and stably form a microscale deposition structure. ## Claims ### Claim 1 An electrohydrodynamic printing apparatus comprising: a nozzle configured to discharge liquid toward a substrate; a voltage applier configured to form an electric field between the nozzle and the substrate; and a laser beam emitter configured to emit a laser beam toward a position to which liquid is discharged on the substrate. ### Claim 2 (depends on 1) The electrohydrodynamic printing apparatus according to claim 1, wherein the laser beam emitter is configured to emit the laser beam in a direction perpendicular to the substrate. ### Claim 3 (depends on 2) The electrohydrodynamic printing apparatus according to claim 2, wherein the nozzle is provided obliquely to the substrate. ### Claim 4 (depends on 1) The electrohydrodynamic printing apparatus according to claim 1, further comprising a slit through which the laser beam passes. ### Claim 5 (depends on 4) The electrohydrodynamic printing apparatus according to claim 4, further comprising a slit adjuster configured to adjust a size of the slit. ### Claim 6 (depends on 5) The electrohydrodynamic printing apparatus according to claim 5, wherein the slit adjuster comprises: a pair of first moving plates configured to move in a first axial direction perpendicular to the laser beam and adjust a spaced distance therebetween to adjust a width of the slit in the first axial direction; and a pair of second moving plates configured to move in a second axial direction perpendicular to the laser beam and the first axial direction and adjust a spaced distance therebetween to adjust a width of the slit in the second axial direction. ### Claim 7 (depends on 6) The electrohydrodynamic printing apparatus according to claim 6, wherein the first moving plate and the second moving plate are disposed as spaced apart in an emission direction of the laser beam. ### Claim 8 (depends on 4) The electrohydrodynamic printing apparatus according to claim 4, further comprising: a check lamp configured to emit check light to pass through the slit and reach the substrate; and a check camera configured to capture the check light that reaches the substrate. ### Claim 9 (depends on 1) The electrohydrodynamic printing apparatus according to claim 1, wherein the laser beam emitter emits laser beams different in wavelength according to kinds of liquid discharged from the nozzle. ### Claim 10 (depends on 1) The electrohydrodynamic printing apparatus according to claim 1, wherein the laser beam is emitted as a continuous laser. ### Claim 11 (depends on 1) The electrohydrodynamic printing apparatus according to claim 1, wherein the laser beam is emitted as a pulse laser. ### Claim 12 (depends on 11) The electrohydrodynamic printing apparatus according to claim 11, wherein a pulse with which the laser beam is emitted is synchronized with a frequency at which the nozzle discharges the liquid. ### Claim 13 (depends on 1) The electrohydrodynamic printing apparatus according to claim 1, further comprising a condensing lens adjacent to the substrate and configured to condense the laser beam. ### Claim 14 (depends on 1) The electrohydrodynamic printing apparatus according to claim 1, further comprising a first monitoring camera configured to monitor in real time a process of depositing and hardening the liquid discharged from the nozzle onto the substrate. ### Claim 15 (depends on 14) The electrohydrodynamic printing apparatus according to claim 14, wherein the first monitoring camera is configured to capture an image viewed on the same line as the laser beam. ### Claim 16 (depends on 14) The electrohydrodynamic printing apparatus according to claim 14, further comprising a cut filter disposed on an optical path between the first monitoring camera and the substrate and configured to filter out a part of light. ### Claim 17 (depends on 14) The electrohydrodynamic printing apparatus according to claim 14, further comprising a second monitoring camera comprising an optical axis formed obliquely to an optical axis of the first monitoring camera, and configured to capture a larger region than the first monitoring camera. ### Claim 18 (depends on 1) The electrohydrodynamic printing apparatus according to claim 1, further comprising: a nozzle driver configured to move the nozzle in x-axial, y-axial and z-axial directions; and a laser-beam emitter driver configured to move the laser beam emitter in the x-axial, y-axial and z-axial directions.