# US 10,864,663 B2 · Imprint apparatus and method of detecting peeling defect in the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,864,663 B2 - Document ID: US10864663B2 - Status: Granted - Kind: B2 - Application number: 15/923,915 - Filed: 2018-03-16 - Published: 2018-10-04 - Granted: 2020-12-15 - Earliest claimed: 2017-03-31 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., Ltd. - Inventors: Futoshi Yoshida - Web page: https://patentgrep.com/patent/US10864663B2 ## CPC - B29C 43/50: Removing moulded articles - B29C 43/18: incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles {(B29C43/206 takes precedence)} - B29C 43/58: Measuring, controlling or regulating {(for bank adjustment in calendering B29C43/245)} - G02B 5/3033: {in the form of a thin sheet or foil, e.g. Polaroid} - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - B29C 2043/5084: {using rotary devices, e.g. turntables or carousels} - B29C 2043/5808: {pressure or compressing force} - B29C 2043/585: {detecting defects, e.g. foreign matter between the moulds, inaccurate position, breakage} - B29L 2011/0066: {Optical filters} - B29L 2031/3475: {Displays, monitors, TV-sets, computer screens} - G02B 2207/101: Nanooptics - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B29L: INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES ## Abstract An imprint apparatus includes: a pressure roller configured to press a film onto a substrate; an idle roller spaced from the pressure roller, the idle roller and pressure roller being configured to peel the film from the substrate; a pressure sensor connected to the pressure roller and configured to sense a first pressure applied to the pressure roller; and a controller configured to detect a peeling defect based on the first pressure. ## Claims ### Claim 1 An imprint apparatus comprising: a pressure roller configured to press a film onto a substrate; an idle roller spaced from the pressure roller, the idle roller and the pressure roller being configured to peel the film from the substrate; a pressure sensor connected to the pressure roller and configured to sense a pressure applied to the pressure roller; and a controller configured to detect a peeling defect based on the pressure. ### Claim 2 (depends on 1) The imprint apparatus of claim 1, wherein the pressure constitutes a first pressure, and wherein the controller detects the peeling defect by comparing the first pressure with a resultant force of a second pressure and a third pressure, the second pressure being a pressure with which the pressure roller presses the film in a first direction, the third pressure being a pressure with which a tension of the film is applied to the pressure roller in the first direction. ### Claim 3 (depends on 1) The imprint apparatus of claim 1, wherein the controller is configured to decrease a peeling speed of the film when the peeling defect is detected. ### Claim 4 (depends on 1) The imprint apparatus of claim 1, wherein the controller is configured to adjust at least one of a peeling angle at which the film is peeled from the substrate and a tension of the film based on a peeling defect detection level. ### Claim 5 (depends on 4) The imprint apparatus of claim 4, wherein the idle roller moves in at least one of a first direction and a second direction orthogonal to the first direction to adjust the peeling angle. ### Claim 6 (depends on 1) The imprint apparatus of claim 1, wherein the pressure roller and the idle roller are configured to concurrently move such that a distance between the pressure roller and the idle roller is maintained while the film is peeled from the substrate. ### Claim 7 (depends on 1) The imprint apparatus of claim 1, further comprising: a film supply roller configured to supply the film to the pressure roller; a film recovery roller configured to recover the film from the idle roller; and a tensioner between the idle roller and the film recovery roller, the tensioner being configured to control a tension of the film. ### Claim 8 An imprint apparatus comprising: a pressing portion comprising a pressure roller configured to press a film onto a substrate and a pressure sensor configured to sense a first pressure of the pressure roller; an idle portion configured to move to adjust a peeling angle at which the film is peeled from the substrate; a tensioner configured to control a tension of the film; and a controller configured to detect a peeling defect based on the pressure. ### Claim 9 (depends on 8) The imprint apparatus of claim 8, wherein the pressure constitutes a first pressure, wherein the pressing portion further comprises: a first roller support member configured to support the pressure roller; and a first actuator configured to control the pressure roller such that the pressure roller presses the film in a first direction with a second pressure, and wherein the pressure sensor is between the first roller support member and the first actuator. ### Claim 10 (depends on 9) The imprint apparatus of claim 9, wherein the controller is configured to detect the peeling defect by comparing the first pressure with a resultant force of the second pressure and a third pressure, the third pressure being a pressure with which the tension of the film is applied to the pressure roller in the first direction. ### Claim 11 (depends on 8) The imprint apparatus of claim 8, wherein the controller is configured to decrease a peeling speed of the film when the peeling defect is detected. ### Claim 12 (depends on 8) The imprint apparatus of claim 8, wherein at least one of the peeling angle and the tension of the film is adjusted based on a peeling defect detection level. ### Claim 13 (depends on 12) The imprint apparatus of claim 12, wherein the idle portion comprises: an idle roller spaced from the pressure roller and configured to peel the film from the substrate; and a second actuator configured to move the idle roller in at least one of a first direction and a second direction orthogonal to the first direction to adjust the peeling angle. ### Claim 14 (depends on 13) The imprint apparatus of claim 13, wherein the pressure roller and the idle roller are configured to be concurrently moved such that a distance between the pressure roller and the idle roller is maintained while the film is peeled from the substrate.