# US 10,864,598 B2 · Evaluation jig and evaluation method for height position detection unit of laser processing apparatus

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- Number: US 10,864,598 B2
- Document ID: US10864598B2
- Status: Granted
- Kind: B2
- Application number: 15/962,481
- Filed: 2018-04-25
- Published: 2018-10-25
- Granted: 2020-12-15
- Earliest claimed: 2017-04-25
- Assignees: Disco Corporation
- Applicants: Disco Corporation
- Inventors: Kenji Furuta
- Web page: https://patentgrep.com/patent/US10864598B2

## CPC

- B23K 26/03: Observing, e.g. monitoring, the workpiece
- B23K 26/046: Automatically focusing the laser beam
- B23K 26/083: {Devices involving movement of the workpiece in at least one axial direction}
- B23K 26/53: for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
- G01B 7/02: for measuring length, width or thickness (G01B7/004, G01B7/12 take precedence)
- G01B 11/0608: {Height gauges}
- B23K 2103/56: {being semiconducting}
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS

## Abstract

Disclosed herein is an evaluation jig that is a jig to be used for evaluation of a height position detection unit that detects the height position of a holding surface of a chuck table of a laser processing apparatus. The evaluation jig includes a to-be-irradiated surface which is to be irradiated with a detection laser beam, an actuator that moves the to-be-irradiated surface in a Z-axis direction, a base section that supports the actuator and is mounted on the holding surface of the chuck table, and a control unit that controls movement of the actuator.

## Claims

### Claim 1

An evaluation jig for a height position detection unit of a laser processing apparatus, the laser processing apparatus including:
a chuck table that holds a workpiece by a holding surface,
a laser beam applying unit having a laser oscillator that applies a processing laser beam having such a wavelength as to be transmitted through the workpiece to the workpiece held by the chuck table, and a focusing unit that focuses the processing laser beam,
a focal point position adjusting unit that displaces a focal point position of the processing laser beam,
the height position detection unit that applies a detection laser beam to the workpiece held by the chuck table through the focusing unit to detect a height position of an upper surface of the workpiece, and
a control unit that controls the focal point position adjusting unit based on a detection signal from the height position detection unit,
the evaluation jig comprising:
a to-be-irradiated surface which is to be irradiated with the detection laser beam;
an actuator that moves the to-be-irradiated surface in a direction orthogonal to the to-be-irradiated surface;
a base section which supports the actuator and is mounted on the holding surface; and
a control section that controls movement of the actuator,
wherein the evaluation jig is seated upon the holding surface of the chuck table.

### Claim 2 (depends on 1)

The evaluation jig for the height position detection unit according to claim 1, wherein the actuator is selected from the group consisting of a piezo actuator and a voice coil motor.

### Claim 3

An evaluation method for a height position detection unit of a laser processing apparatus, the evaluation method comprising:
mounting an evaluation jig on a holding surface of a chuck table of the laser processing apparatus, the evaluation jig including a to-be-irradiated surface which is to be irradiated with a detection laser beam, an actuator that moves the to-be-irradiated surface in a direction orthogonal to the to-be-irradiated surface, a base section which supports the actuator and is mounted on the holding surface of the chuck table, and a control section that controls movement of the actuator;
setting a movement program for controlling the actuator of the evaluation jig to move the to-be-irradiated surface at a desired amplitude;
irradiating the to-be-irradiated surface of the evaluation jig mounted on the holding surface with the detection laser beam of the laser processing apparatus and detecting variation in a height position of the to-be-irradiated surface moved at the desired amplitude according to the movement program by the height position detection unit of the laser processing apparatus;
comparing the variation in the height position detected by the height position detection unit with the amplitude set as the desired amplitude; and
determining whether or not the height position detection unit has successfully detected the height position of the to-be-irradiated surface.

### Claim 4 (depends on 1)

The evaluation jig for the height position detection unit of a laser processing apparatus according to claim 1, wherein the evaluation jig further comprises:
a to-be-irradiated member that includes the to-be-irradiated surface thereon; and
a hollow portion that is seated upon the base section and that is configured and arranged for movably supporting the to-be-irradiated member therein.

### Claim 5 (depends on 4)

The evaluation jig for the height position detection unit of a laser processing apparatus according to claim 4, wherein the hollow portion comprises a hollow cylindrical portion formed in a hollow cylindrical shape.

### Claim 6 (depends on 3)

The evaluation method according to claim 3, wherein the irradiating and the detecting variation in the height position is performed while moving the to-be-irradiated surface in a Z-axis direction and without moving the to-be-irradiated surface in an X-axis direction.