Dispensing device and liquid transfer method

A dispensing device comprising:

• a primary tank which accommodates a liquid;
• primary-side pressure adjusting means for adjusting pressure in an interior of the primary tank;
• a plurality of branch flow paths connected to the primary tank;
• a plurality of secondary tanks which are provided corresponding to the plurality of branch flow paths, respectively, and each of which is connected to a corresponding branch flow path;
• a state detection part which detects a state of an interior of at least one of the plurality of secondary tanks;
• a plurality of valves each provided in the middle of each of the plurality of branch flow paths;
• and
• a control part which controls opening and closing of each of the plurality of valves, based on a detection result of the state detection part,
• wherein the state detection part includes a plurality of pressure sensors which are provided corresponding to the plurality of secondary tanks, respectively, and each of which detects pressure in an interior of a corresponding secondary tank, and
• wherein the control part controls the valve, corresponding to the secondary tank, among the plurality of secondary tanks, in regarding to which it has been determined that the amount of accommodated liquid which is estimated from the pressure detected by the pressure sensor has reached a predetermined amount, to be in a closed state, in a case in which the liquid is transferred from the primary tank to each of the plurality of secondary tanks, the dispensing device further comprising:
• secondary-side pressure adjusting means for adjusting the pressure in the interior of each of the plurality of secondary tanks, based on the pressure detected by each of the plurality of pressure sensors, in a case in which the liquid is transferred from the primary tank to each of the plurality of secondary tanks;
• a first filter which suppresses inflow of unnecessary components contained in a gas which is supplied to the primary tank into the interior of the primary tank in a case in which the primary-side pressure adjusting means pressurizes the interior of the primary tank;
• and
• a second filter which suppresses inflow of unnecessary components contained in a gas which is supplied to each of the plurality of secondary tanks, into the interior of each of the plurality of secondary tanks in a case in which the secondary-side pressure adjusting means pressurizes the interior of each of the plurality of secondary tanks,
• wherein each of the plurality of secondary tanks includes a first subtank which accommodates the liquid which is transferred from the primary tank, and a second subtank which is connected to the first subtank through a connection pipe and has a flow port through which the gas which is accommodated in each of the plurality of secondary tanks flows in a case in which the secondary-side pressure adjusting means pressurizes or depressurizes the interior of each of the plurality of secondary tanks, and
• wherein the second filter is provided in the middle of the connection pipe.

A dispensing device comprising,

• a primary tank which accommodates a liquid;
• primary-side pressure adjusting means for adjusting pressure in an interior of the primary tank;
• a plurality of branch flow paths connected to the primary tank;
• a plurality of secondary tanks which are provided corresponding to the plurality of branch flow paths, respectively, and each of which is connected to a corresponding branch flow path;
• a state detection part which detects a state of an interior of at least one of the plurality of secondary tanks;
• a plurality of valves each provided in the middle of each of the plurality of branch flow paths;
• and
• a control part which controls opening and closing of each of the plurality of valves, based on a detection result of the state detection part,
• wherein the state detection part includes a plurality of level sensors which are provided corresponding to the plurality of secondary tanks, respectively, and each of which detects a height of a liquid level of a liquid accommodated in an interior of a corresponding secondary tank, and
• wherein the control part controls the valve corresponding to each of the plurality of secondary tanks, among the plurality of secondary tanks, in regarding to which it has been determined that the amount of accommodated liquid which is estimated from the height of the liquid level detected by the level sensor has reached a predetermined amount, to be in a closed state, in a case in which the liquid is transferred from the primary tank to each of the plurality of secondary tanks, the dispensing device further comprising:
• secondary-side pressure adjusting means for adjusting the pressure in the interior of each of the plurality of secondary tanks, based on the height of the liquid level detected by each of the plurality of level sensors, in a case in which the liquid is transferred from the primary tank to each of the plurality of secondary tanks;
• a first filter which suppresses inflow of unnecessary components contained in a gas which is supplied to the primary tank, into the interior of the primary tank in a case in which the primary-side pressure adjusting means pressurizes the interior of the primary tank;
• and
• a second filter which suppresses inflow of unnecessary components, contained in a gas which is supplied to each of the plurality of secondary tanks, into the interior of each of the plurality of secondary tanks in a case in which the secondary-side pressure adjusting means pressurizes the interior of each of the plurality of secondary tanks,
• wherein each of the plurality of secondary tanks includes a first subtank which accommodates the liquid which is transferred from the primary tank, and a second subtank which is connected to the first subtank through a connection pipe and has a flow port into through which the gas, which is accommodated in each of the plurality of secondary tanks flows in a case in which the secondary-side pressure adjusting means pressurizes or depressurizes the interior of each of the plurality of secondary tanks, and
• wherein the second filter is provided in the middle of the connection pipe.