Electronic device including a capacitor
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKai-Fung Chang, Lien-Yao Tsai, Baohua Niu, Yi-Chuan Teng, Chi-Yuan Shih
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Abstract
An electronic device includes a capacitor and a passivation layer covering the capacitor. The capacitor includes a first electrode, a dielectric layer disposed over the first electrode and a second electrode disposed over the dielectric layer. An area of the first electrode is greater than an area of the dielectric layer, and the area of the dielectric layer is greater than an area of the second electrode so that a side of the capacitor has a multi-step structure.
Claims19
An electronic device, comprising:
- a capacitor including:
- a first electrode;
- a dielectric layer disposed over the first electrode;
- a second electrode disposed over the dielectric layer;
- and
- a barrier layer disposed over the second electrode;
- and
- a passivation layer covering the capacitor such that the passivation layer is in contact with side faces of the first electrode, the dielectric layer, the second electrode and the barrier layer, wherein:
- an area of the first electrode is greater than an area of the dielectric layer, and the area of the dielectric layer is greater than an area of the second electrode so that a side of the capacitor has a multi-step structure,
- each of side faces of the dielectric layer has a first tapered surface, a flat surface and a second tapered surface located at a higher level than the first tapered surface,
- the flat surface is disposed between the first tapered surface and the second tapered surface, and
- the passivation layer is in contact with the first tapered surface, the flat surface and the second tapered surface.
An electronic device, comprising:
- a capacitor including:
- a first electrode;
- a dielectric layer disposed over the first electrode;
- and
- a second electrode disposed over the dielectric layer;
- a passivation layer covering the capacitor;
- and
- a conductive layer disposed over the passivation layer,
- the conductive layer is electrically floating,
- an area of the first electrode is greater than an area of the dielectric layer, and the area of the dielectric layer is greater than an area of the second electrode so that a side of the capacitor has a multi-step structure.
An electronic device, comprising:
- a capacitor including:
- a first electrode;
- a dielectric layer disposed over the first electrode;
- a second electrode disposed over the dielectric layer;
- and
- a barrier layer disposed over the second electrode;
- a passivation layer covering the capacitor such that the passivation layer is in contact with side faces of the first electrode, the dielectric layer, the second electrode and the barrier layer;
- and
- a conductive layer disposed over and in contact with the passivation layer, and
- wherein an area of the first electrode is greater than an area of the dielectric layer, and the area of the dielectric layer is greater than an area of the second electrode so that a side of the capacitor has a multi-step structure, and
- the conductive layer continuously covers the multi-step structure of the side of the capacitor from a side of the first electrode to a side of the barrier layer with interposing the passivation layer between the conductive layer and the multi-step structure.
Dependencies are inferred from the claim text.