Method and system for lot-tool assignment
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsRen-Chyi You, An-Wei Peng, Chang-Zong Liu, Jun-Sheng Yeh
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Abstract
A method is disclosed and includes generating a tool-lot relationship based on at least one process constraint and a dispatching rule which includes dispatching preferences for operating at least one lot; assigning the at least one lot to at least one tool by using the tool-lot relationship; and the at least one tool, assigned using the tool-lot relationship, processing the at least one lot by utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.
Claims20
A system, comprising:
- at least one processor;
- and
- at least one memory including computer program codes for one or more programs, when executed by the at least one processor, cause the system to:
- determine whether there is a dispatching rule in a dispatching rule database, the dispatching rule including dispatching preferences each indicating that at least one tool feeds back preferences thereof for at least one lot;
- generate a tool-lot relationship based on at least one process constraint in a process constraint database, and based on the dispatching rule which includes the dispatching preferences;
- and
- process the at least one lot by the at least one tool with utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.
A method comprising:
- determine whether there is a dispatching rule in a dispatching rule database, the dispatching rule including dispatching preferences each indicating that at least one tool feeds back preferences thereof for at least one lot;
- generating a tool-lot relationship based on at least one process constraint and the dispatching rule which includes the dispatching preferences;
- assigning the at least one lot to the at least one tool by using the tool-lot relationship;
- and
- the at least one tool, assigned using the tool-lot relationship, processing the at least one lot by utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.
A non-transitory computer readable medium comprising computer executable instructions for carrying out a method, the method comprising:
- determine whether there is a dispatching rule in a dispatching rule database, the dispatching rule including dispatching preferences each indicating that at least one tool feeds back preferences thereof for at least one lot;
- assigning the at least one lot to the at least one tool by using a tool-lot relationship that is generated based on at least one process constraint and the dispatching rule which includes the dispatching preferences;
- and
- processing the at least one lot by the at least one tool with utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.
Dependencies are inferred from the claim text.