Imprint apparatus, imprint method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsKen-ichiro Shinoda, Masahiro Tamura
Life of this patent
Estimating the term…
Abstract
An imprint apparatus includes a mold holder for holding a mold, a substrate holder for holding a substrate, a dispenser for arranging imprint material on the substrate, and a scope for capturing an image of a mark. The substrate holder includes a reference plate having a reference mark whose image is captured by the scope, the dispenser is arranged in a first direction when viewed from the mold holder, and the reference plate is arranged between a virtual straight line which is parallel to a second direction perpendicular to the first direction when viewed from the mold holder and passes through a center of the substrate holder, and an edge of the substrate holder located in the first direction when viewed from the virtual straight line.
Claims15
An imprint apparatus that forms a pattern on a substrate by bringing a mold into contact with an imprint material arranged on the substrate and curing the imprint material, the apparatus comprising:
- a mold holder configured to hold the mold;
- a substrate holder configured to hold the substrate;
- a dispenser configured to arrange the imprint material on the substrate;
- and
- a scope configured to capture an image of a mark,
- wherein the substrate holder includes a reference plate which has a reference mark whose image is captured by the scope, the dispenser is arranged in a first direction when viewed from the mold holder,
- wherein the substrate holder has two sides parallel to the first direction and two sides parallel to a second direction perpendicular to the first direction, and the reference plate is arranged between a center of the substrate holder and a corner of the substrate holder, which is located in the first direction when viewed from a virtual straight line which is parallel to the second direction and passes through the center of the substrate holder, and
- wherein no reference plate having a reference mark is arranged between the virtual straight line and an edge of the substrate holder, which is located in an opposite direction of the first direction when viewed from the virtual straight line.
An imprint apparatus that forms a pattern on a substrate by bringing a mold into contact with an imprint material arranged on the substrate and curing the imprint material, the apparatus comprising:
- a mold holder configured to hold the mold;
- a substrate holder configured to hold the substrate;
- a dispenser configured to arrange the imprint material on the substrate;
- and
- a scope configured to capture an image of a mark,
- wherein the substrate holder includes a reference plate which has a reference mark whose image is captured by the scope, and the reference mark includes an electrically conductive reflector and a transparent electrically conductive film configured to cover the electrically conductive reflector.
An imprint method of forming a pattern on a substrate held by a substrate holder including a reference plate by bringing a mold into contact with an imprint material arranged on the substrate and curing the imprint material, the method comprising:
- performing a process of arranging the imprint material for each of a plurality of shot regions of the substrate by a dispenser, bringing the mold into contact with the imprint material, and curing the imprint material,
- wherein the substrate holder is driven so the reference plate does not face the mold from a start of the process to an end of the process,
- wherein the dispenser is arranged in a first direction when viewed from the mold holder,
- wherein the substrate holder has a rectangular shape which has two sides parallel to the first direction and two sides parallel to a second direction perpendicular to the first direction, and the reference plate is arranged between a center of the substrate holder and an apex of the rectangular shape, which is located in the first direction when viewed from a virtual straight line which is parallel to the second direction and passes through the center of the substrate holder, and
- wherein no reference plate is arranged between the virtual straight line and an edge of the substrate holder, which is located in an opposite direction of the first direction when viewed from the virtual straight line.
Dependencies are inferred from the claim text.