Substrate transfer device

A substrate transfer device, comprising:

• a pair of guide mechanisms disposed in a state of being spaced apart from each other so as to extend in a substrate conveyance direction;
• a first conveyor belt disposed on each of the pair of guide mechanisms at an upstream side in the substrate conveyance direction and configured to convey a substrate to a downstream side in the substrate conveyance direction;
• a second conveyor belt disposed on each of the pair of guide mechanisms at the downstream side in the substrate conveyance direction and configured to convey the substrate conveyed by the first conveyor belt further to the downstream side;
• a holding device configured to hold the substrate supported by both the first conveyor belt and the second conveyor belt;
• and
• a lifting and lowering device configured to lift and lower the pair of guide mechanisms, the first conveyor belt, the second conveyor belt, and the holding device integrally, wherein
• a distance between a downstream end of the first conveyor belt and an upstream end of the second conveyor belt is shorter than a substrate length in the substrate conveyance direction, and
• work is performed on the substrate held by the holding device.