Electronic assembly that includes void free holes
AssigneeIntel Corporation
InventorsSri Ranga Sai Boyapati, Amanda E. Schuckman, Sashi S. Kandanur, Srinivas Pietambaram, Mark Hlad, Kristof Darmawikarta
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AssigneeIntel Corporation
InventorsSri Ranga Sai Boyapati, Amanda E. Schuckman, Sashi S. Kandanur, Srinivas Pietambaram, Mark Hlad, Kristof Darmawikarta
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A method that includes electroplating both sides of a core and the through hole of a core with a conductive material to cover both sides of the core with the conductive material and to form a conductive bridge in the through hole, wherein the core has a thickness greater than 200 microns; etching the conductive material that covers both sides of the core to reduce the thickness of the conductive material to about 1 micron; applying a film resist to the core; exposing and developing the resist film to form patterns on the conductive material on both sides of the core; and electroplating additional conductive material on the (i) conductive material on both sides of the core (ii) conductive material within the through hole; and (iii) conductive bridge to fill the through hole with conductive material without any voids and to form conductive patterns on both sides of the core.
A method comprising:
Dependencies are inferred from the claim text.
From the US filing history. Foreign family members aren’t listed.
Characterised by electroplating method: by direct electroplating
From solutions: of copper
Characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern: initial plating of…
Plated through-holes or plated via connections: plated through-holes specially for multilayer circuits, e.g. having connections to inner circuit…
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This application is a U.S. National Stage Filing under 35 U.S.C. 371 from International Application No. PCT/US2015/052446, filed on Sep. 25, 2015, and published as WO 2017/052642, which application is incorporated herein by reference in its entirety.
There are two conventional approaches for forming copper patterns on core layers. A typical copper pattern includes copper traces on both sides of the core and copper filled through hole vias that extend thorough the core.
One known patterning technique involves covering both sides of the core with electrolytic copper and also filling a laser drilled through hole in the core with the electrolytic copper. Both sides of the core are then subtractive patterned and etched in order to form conductive traces on both sides of the core.
FIG. 1 is a schematic side view illustrating a prior art electronic assembly that includes through holes with voids.
FIG. 2 is a schematic side view illustrating an example electronic assembly that includes through holes without voids.
FIG. 3 is a process flow table that compares a prior art electronic assembly fabrication method with an example electronic assembly fabrication method.
The following description and the drawings sufficiently illustrate specific embodiments to enable those skilled in the art to practice them. Other embodiments may incorporate structural, logical, electrical, process, and other changes. Portions and features of some embodiments may be included in, or substituted for, those of other embodiments. Embodiments set forth in the claims encompass all available equivalents of those claims.
Orientation terminology, such as “horizontal,” as used in this application is defined with respect to a plane parallel to the conventional plane or surface of a wafer or substrate, regardless of the orientation of the wafer or substrate. The term “vertical” refers to a direction perpendicular to the horizontal as defined above. Prepositions, such as “on,” “side” (as in “sidewall”), “higher,” “lower,” “over,” and “under” are defined with respect to the conventional plane or surface being on the top surface of the wafer or substrate, regardless of the orientation of the wafer or substrate.
The electronic assemblies and method may overcome the drawbacks that are associated with the prior art electronic assemblies and methods. The electronic assemblies and methods described herein produce void-free vias.
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