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US 10,855,251 B2Granted
Unreleased plane acoustic wave resonators
AssigneeTexas Instruments Incorporated
InventorTing-Ta Yen
Life of this patent
Estimating the term…
Abstract
Unreleased plane acoustic wave (PAW) resonators are disclosed. An example unreleased PAW resonator includes a substrate, a first acoustic reflector disposed on the substrate, and a piezoelectric layer disposed on the first acoustic reflector, wherein the first acoustic reflector and the piezoelectric layer are unreleased from the substrate.
Claims17
An unreleased plane acoustic wave (PAW) resonator, comprising:
- a substrate;
- a first acoustic reflector on the substrate;
- a piezoelectric layer on the first acoustic reflector, the first acoustic reflector and the piezoelectric layer being unreleased from the substrate;
- and
- a second acoustic reflector adjacent an edge of the piezoelectric layer.
2 more elements
An integrated circuit (IC) package comprising:
- an unreleased plane acoustic wave (PAW) resonator including:
- a substrate;
- a first acoustic reflector unreleasably on the substrate;
- a piezoelectric layer on the first acoustic reflector;
- and
- a second acoustic reflector adjacent an edge of the piezoelectric layer.
3 more elements
An unreleased plane acoustic wave (PAW) resonator, comprising:
- a substrate;
- a first acoustic reflector on the substrate;
- a piezoelectric layer on the first acoustic reflector, the piezoelectric layer having opposite first and second surfaces and opposite first and second edges, and the first acoustic reflector facing the first surface;
- a second acoustic reflector adjacent the first edge and facing the first edge;
- a third acoustic reflector adjacent the second edge and facing the second edge;
- a first electrode having first fingers on the second surface;
- and
- a second electrode having second fingers on the second surface, the first fingers interlaced with the second fingers.
5 more elements
Dependencies are inferred from the claim text.