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US 10,855,249 B2Granted
Bulk acoustic wave resonator and filter including the same
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsTae Kyung Lee, Jae Sang Lee, Ran Hee Shin, In Young Kang, Sung Sun Kim, Sung Han
Life of this patent
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Abstract
A bulk acoustic wave resonator includes a substrate, a first electrode and a second electrode formed on the substrate, and a piezoelectric layer provided between the first electrode and the second electrode. Either one or both of the first electrode and the second electrode include a molybdenum-tungsten alloy having a weight ratio of molybdenum to tungsten in a range of 3:1 to 1:3.
Claims7
A bulk acoustic wave resonator comprising:
- a substrate;
- a first electrode and a second electrode formed on the substrate;
- a seed layer formed between the substrate and at least one of the first and second electrodes, wherein the seed layer has a hexagonal close packing (HCP) structure, and comprises an alloy containing Ti;
- and
- a piezoelectric layer disposed between the first electrode and the second electrode,
- wherein either one or both of the first electrode and the second electrode comprise a molybdenum-tungsten alloy, and the seed layer is disposed in an active region of the bulk acoustic wave resonator,
- wherein the weight ratio between the molybdenum and the tungsten in the molybdenum-tungsten alloy is about 3:1.
4 more elements
Dependencies are inferred from the claim text.