Antenna substrate and method of manufacturing same

A method of manufacturing an antenna substrate, the method comprising:

• preparing a cap substrate including a first insulating layer and a plurality of first antenna conductors, the plurality of first antenna conductors being arranged in vertical and horizontal directions with a distance between each pair of adjacent first antenna conductors on upper and lower surfaces of the first insulating layer so to be opposite to each other with the first insulating layer therebetween;
• preparing a frame substrate including a second insulating layer and an opening located in the second insulating layer, the opening having an outer periphery that surrounds an individual of or a collective number of outer peripheries of the plurality of first antenna conductors in a top view;
• preparing a base substrate including a third insulating layer and a plurality of second antenna conductors disposed on an upper surface of the third insulating layer;
• disposing a first bonding member in a region other than a region where the opening is located between a lower surface of the first insulating layer and an upper surface of the second insulating layer and between a lower surface of the second insulating layer and the upper surface of the third insulating layer, disposing the frame substrate and the cap substrate in an order of the frame substrate first and the cap substrate second on the base substrate with the first bonding member between the frame substrate and the cap substrate, and temporarily fixing the frame substrate and the cap substrate to the base substrate, and
• disposing a second bonding member partially making contact with the first bonding member between the lower surface of the first insulating layer and the upper surface of the second insulating layer and between the lower surface of the second insulating layer and the upper surface of the third insulating layer, and permanently fixing the base substrate, the frame substrate, and the cap substrate with the second bonding member.