Photolithographic patterning of organic electronic devices

A method of making an OLED device comprising:

• a) providing a device substrate having a first array of bottom electrodes, a second array of bottom electrodes and a third array of bottom electrodes;
• b) depositing third organic EL medium layers over the device substrate including over the first, second and third arrays of bottom electrodes, wherein the third organic EL medium layers include at least a third light-emitting layer;
• c) providing over the third organic EL medium layers a first undercut lift-off structure having a first pattern of openings corresponding to the first array of bottom electrodes;
• d) using the first undercut lift-off structure as an etch mask and removing by dry etching the third organic EL medium layers from areas over the first array of bottom electrodes;
• e) depositing first organic EL medium layers including at least a first light-emitting layer over the first undercut lift-off structure and over the first array of bottom electrodes;
• f) removing the first undercut lift-off structure and overlying first organic EL medium layers by treatment with a lift-off agent comprising a fluorinated solvent to form a first intermediate structure;
• g) providing over the first intermediate structure a second undercut lift-off structure having a second pattern of openings corresponding to the second array of bottom electrodes;
• h) using the second undercut lift-off structure as an etch mask and removing by dry etching the third organic EL medium layers from areas over the second array of bottom electrodes;
• i) depositing second organic EL medium layers including at least a second light-emitting layer over the second undercut lift-off structure and over the second array of bottom electrodes;
• j) removing the second undercut lift-off structure and overlying second organic EL medium layers by treatment with a lift-off agent comprising a fluorinated solvent to form a second intermediate structure;
• and
• k) depositing a common top electrode over the second intermediate structure in electrical contact with the first, second and third organic EL medium layers.