Parabolic vertical hybrid light emitting diode
AssigneeFacebook Technologies, LLC
InventorCeline Claire Oyer
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Abstract
A micro-light emitting diode (LED) includes an epitaxial structure having a mesa and a top portion on the mesa. The epitaxial structure further includes quantum wells within the mesa configured to emit light, claddings surrounding the quantum wells, and a light emitting surface on a side opposite the mesa and top portion. A reflective contact is on the top portion of the epitaxial structure. Light emitted from the quantum wells are transmitted through the mesa and the top portion in first directions, and reflected by the reflective contact back through the top portion and the mesa in second directions toward the light emitting surface. The top portion allows the quantum wells to be positioned at a parabola focal point of the mesa without limiting cladding thickness.
Claims19
A method of manufacturing a light emitting diode (LED), comprising:
- forming an epitaxial structure including a light generation region;
- forming a contact on the epitaxial structure;
- depositing photosensitive material on the contact;
- and
- etching the epitaxial structure with the contact and the photosensitive material as masks to form a mesa having a truncated top and a top portion over the truncated top, wherein etching the epitaxial structure causes the mesa to have a parabolic shape and the light generation region to be positioned in the mesa.
Dependencies are inferred from the claim text.