Lift-off method

A lift-off method of transferring onto a transfer substrate an optical device layer of an optical device wafer having the optical device layer formed over a front surface of an epitaxy substrate through a GaN buffer layer, the lift-off method comprising:

• a transfer substrate bonding step of bonding the transfer substrate onto a front surface of the optical device layer of the optical device wafer through a bonding layer, to form a composite substrate;
• a buffer layer breaking step of applying a pulsed laser beam of such a wavelength as to be transmitted through the epitaxy substrate of the optical device wafer constituting the composite substrate and absorbed in the buffer layer formed on the epitaxy substrate from a back surface side of the epitaxy substrate, to break the buffer layer via a reaction force generated when a stress generated by separation of GaN constituting the buffer layer into Ga and N2 gas is relieved;
• and
• an optical device layer transferring step of peeling the optical device layer from the epitaxy substrate and transferring the optical device layer onto the transfer substrate, after the buffer layer breaking step is performed,
• wherein the buffer layer breaking step includes a first applying step of applying the pulsed laser beam to a central portion of the epitaxy substrate, excluding a peripheral portion of the epitaxy substrate completely surrounding the central portion, so, so that the stress generated by the separation of GaN is confined within the optical device wafer by the peripheral portion, and a second applying step of applying the pulsed laser beam on the peripheral portion after the first applying step, so that the stress is relieved simultaneously at the end of the buffer layer breaking step, whereby the optical device layer is peeled from the epitaxy substrate, and transferred onto the transfer substrate.