Active photonic device having a darlington configuration with feedback

A method of manufacturing an active photonic device having a Darlington configuration, the method comprising:

• providing a substrate;
• disposing a collector layer over the substrate, the collector layer comprising:
• an inner collector region;
• and
• an outer collector region that substantially surrounds the inner collector region and is spaced apart from the inner collector region;
• disposing a base layer over the collector layer, the base layer comprising:
• an inner base region;
• a first outer base region;
• and
• a second outer base region, wherein the first outer base region and the second outer base region are spaced apart from the inner base region and each other while substantially surrounding the inner base region;
• disposing an emitter layer over the base layer, the emitter layer comprising:
• an inner emitter region that is ring-shaped and extends substantially around an outer periphery of the inner base region;
• a first outer emitter region;
• and
• a second outer emitter region, wherein the first outer emitter region and the second outer emitter region are spaced apart from the inner base region and each other while substantially surrounding the inner emitter region;
• fabricating a first connector structure that electrically couples the inner collector region with the first outer base region;
• fabricating a second connector structure that electrically couples the first outer emitter region to the second outer base region;
• and
• fabricating a feedback resistor that electrically couples the outer collector region and the inner base region.