Dummy cell arrangement and method of arranging dummy cells

A method of arranging dummy cells in a semiconductor device, comprising:

• defining a dummy region on a substrate;
• filling up said dummy region with a plurality of unit dummy cells arranged in rows and columns, wherein said unit dummy cell comprises exactly one base dummy unit and exactly two fixed dummy units at two opposite sides of said exactly one base dummy unit in a row direction, and said base dummy unit comprises at least one fin, at least one gate traversing said at least one fin and at least one contact on said at least one fin, and said fixed dummy unit is larger than said base dummy unit and comprises at least one said fins, at least two said gates traversing said at least one fin and at least two said contacts on said at least one said fin, and a number of said fins in said fixed dummy unit is larger than a number of said fins in said base dummy unit;
• filling up remaining said dummy region with a plurality of standard extended dummy cells arranged at the end of said unit dummy cells in rows and columns, wherein each said standard extended dummy cell comprises at least two said base dummy units and exactly two fixed dummy units at two opposite sides of said at least two base dummy units in said row direction, and said at least two base dummy units are directly contacting one another;
• and
• filling up remaining said dummy region with a plurality of flexible extended dummy cells arranged at the end of said unit dummy cells in rows and columns, wherein each flexible extended dummy cell comprises at least two said base dummy units and a plurality of flexible dummy units at two opposite sides of said at least two base dummy units in said row direction or in a column direction, and said flexible dummy unit comprises one said gate traversing no said fin and one said contact, wherein said at least one gate in said base dummy unit and said gate in said flexible dummy units are a plurality of gates, and each of said gates is a singular gate being vertically arranged.