Integrated fan-out package and method of fabricating the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHui-Jung Tsai, Hung-Jui Kuo, Jyun-Siang Peng
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHui-Jung Tsai, Hung-Jui Kuo, Jyun-Siang Peng
Estimating the term…
A method of fabricating an integrated fan-out package is provided. The method includes the following steps. An integrated circuit component is provided on a substrate. An insulating encapsulation is formed on the substrate to encapsulate sidewalls of the integrated circuit component. A redistribution circuit structure is formed along a build-up direction on the integrated circuit component and the insulating encapsulation. The formation of the redistribution circuit structure includes the following steps. A dielectric layer and a plurality of conductive vias embedded in the dielectric layer are formed, wherein a lateral dimension of each of the conductive vias decreases along the build-up direction. A plurality of conductive wirings is formed on the plurality of conductive vias and the dielectric layer. An integrated fan-out package of the same is also provided.
A method of fabricating an integrated fan-out package, comprising:
A method of fabricating an integrated fan-out package, comprising:
An integrated fan-out package, comprising:
Dependencies are inferred from the claim text.