Method of curing thermoplastics with microwave energy
AssigneeApplied Materials, Inc.
InventorRobert L. Hubbard
Life of this patent
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Abstract
A method for densifying thermoplastics, particularly polyimides, for use in conjunction with electronic circuits while producing improved physical properties and a high degree of crystallinity, involves variable frequency microwave (VFM) processing at temperatures typically 100° C. below the glass transition temperature or lower, for times of about 50 to 100 minutes. It is particularly applicable to polymers based on BPDA-PPD, but may also be generally applied to other intentionally designed polyimide structures with the same features. The invention enables the creation of layered structures involving integrated circuits with small feature sizes and overcoatings of polymers with high Tg and other desirable properties.
Claims8
An electronic device comprising:
- a semiconductor having a functional integrated circuit with functional circuit features in the range from 100 to 10 nm in width thereon;
- and, a substantially dense, epoxy-free thermoplastic coating on integrated circuit features, said coating having a Tg in the range of about 350 to 400° C., wherein the coefficient of thermal expansion of the thermoplastic coating sufficiently matches that of the semiconductor to reduce warpage of the coating-semiconductor combination, wherein the thermoplastic coating consists of linear polyamide having a di-functional polyamic acid section and a di-functional amine section, and wherein the polyamide has a backbone consisting essentially of atoms with sp2 orbitals.
An electronic device comprising:
- a semiconductor having a functional integrated circuit with functional circuit features in the range from 100 to 10 nm in width thereon;
- and, a substantially dense thermoplastic coating thereon, said coating having a Tg in the range of 300 to 400° C., wherein the coefficient of thermal expansion of the substantially dense thermoplastic coating sufficiently matches that of the semiconductor to reduce warpage of the coating-semiconductor combination, wherein the thermoplastic coating consists of linear polyamide having a di-functional polyamic acid section and a di-functional amine section, wherein the polyamide has a backbone consisting essentially of atoms with sp2 orbitals, and wherein the thermoplastic coating has a modulus higher than would be obtained with the same soluble polyamide precursor cured with oven curing without assist from microwave curing.
Dependencies are inferred from the claim text.