Method and IC design with non-linear power rails
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSheng-Hsiung Wang, Tung-Heng Hsieh, Bao-Ru Young
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Abstract
The present disclosure provides a method for fabricating an integrated circuit (IC). The method includes receiving an IC layout having active regions, conductive contact features landing on the active regions, and a conductive via feature to be landing on a first subset of the conductive contact features and to be spaced from a second subset of the conductive contact features; evaluating a spatial parameter of the conductive via feature to the conductive contact features; and modifying the IC layout according to the spatial parameter such that the conductive via feature has a S-curved shape.
Claims20
A method for fabricating an integrated circuit (IC), comprising:
- receiving an IC layout having a first pattern layer and a second pattern layer to be formed on respective material layers of a semiconductor substrate, wherein
- the first pattern layer includes first conductive contact features and second conductive contact features spaced along a first direction, each of the first and second contact features having an elongated shape oriented in a second direction orthogonal to the first direction, and
- the second pattern layer includes a conductive via feature to be landing on the first the conductive contact features and to be distanced away from the second conductive contact features;
- and
- modifying the conductive via feature to a first polygon that is overlapped with the first conductive contact features and is distanced from the second conductive contact features, wherein the first polygon has an edge oriented in a tilted direction being different from the first and second directions.
A method for fabricating an integrated circuit (IC), comprising:
- receiving an IC layout having a first pattern layer and a second pattern layer to be formed on respective material layers of a semiconductor substrate, wherein
- the first pattern layer includes first conductive contact features and second conductive contact features spaced along a first direction, each of the first and second contact features having an elongated shape oriented in a second direction orthogonal to the first direction, and
- the second pattern layer includes a conductive via feature to be landing on the first the conductive contact features and to be distanced away from the second conductive contact features;
- and
- modifying the conductive via feature to a first polygon that is overlapped with the first conductive contact features and is distanced from the second conductive contact features, wherein the first polygon has an edge oriented in a tilted direction being different from the first and second directions, and wherein the conductive via feature is modified to have a S-curved shape.
A method for fabricating an integrated circuit (IC), comprising:
- receiving an IC layout having a first pattern layer and a second pattern layer to be formed on respective material layers of a semiconductor substrate, wherein
- the first pattern layer includes first conductive contact features and second conductive contact features spaced along a first direction, each of the first and second contact features having an elongated shape oriented in a second direction orthogonal to the first direction, and
- the second pattern layer includes a conductive via feature to be landing on the first the conductive contact features and to be distanced away from the second conductive contact features;
- and
- modifying the conductive via feature to a first polygon that is overlapped with the first conductive contact features and is distanced from the second conductive contact features, wherein the first polygon has an edge oriented in a tilted direction being different from the first and second directions, wherein the modifying of the conductive via feature includes
- abstracting a second polygon from the conductive via feature if a lateral distance between one of the second conductive contact features and the conductive via feature is less than a spacing target;
- and
- adding a third polygon to the conductive via feature if an overlapping area between one of the first conductive contact features and the conductive via feature is less than an overlapping target.
Dependencies are inferred from the claim text.