Method for producing an interface intended to assemble temporarily a microelectronic support and a manipulation handle, and temporary assembly interface
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsJean Charbonnier, Frederic-Xavier Gaillard
Life of this patent
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Abstract
Method for producing an interface for assembling temporarily a microelectronic support and a handle, comprising at least the formation of a first layer comprising at least one material capable of releasing at least one chemical species under the action of a physical-chemical treatment, the formation of a second layer comprising at least one material capable of receiving the at least one chemical species so as to cause its embrittlement, and the embrittlement of the interface by application of a heat treatment, such that the at least one species is released from the first layer and reacts with all or part of the material of the second layer.
Claims18
A production method for producing an interface intended to assemble temporarily a first and a second element, comprising at least:
- a) formation of a first layer comprising at least one material capable of releasing at least one chemical species under action of a physical-chemical treatment,
- b) formation of a second layer comprising at least one material capable of receiving the at least one chemical species so as to cause embrittlement of the second layer, the first layer and a second layer being at least in part in contact,
- wherein the embrittlement comprises obtaining an adherence energy of the second layer to one of the first and second elements along a plane transversal to a stack direction of the first layer and second layer less than or equal to 1 J/m2.
An interface intended to assemble temporarily a first and second element comprising at least:
- a first layer comprising at least one material capable of releasing at least one chemical species under the action of a physical-chemical treatment, and
- a second layer comprising at least one material capable of receiving the one or more chemical species so as to cause embrittlement of the second layer, wherein an adherence energy of the second layer to one of the first and second elements along a plane transversal to a stack direction of the first layer and second layer is less than or equal to 1.1/m2.
Dependencies are inferred from the claim text.