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US 10,854,487 B2Granted
Method for the transportation and storage of a semiconductor plate in a hermetic container
AssigneesCentre National De La Recherche Scientifique, Universite Grenoble Alpes
InventorBernard Pelissier
Life of this patent
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Abstract
The invention relates to a method for the transportation and/or storage of at least one semiconductor plate, in which the plate is disposed in a hermetic container (1) filled with hydrogen at a pressure of between 10−1 and 4*103 Pa and, optionally, at least one inert gas, the total pressure in the casing being between 10−1 and 5*104 Pa.
Claims7
A method of transporting and/or storing at least one semiconductor plate, comprising:
- providing a hermetic container for transporting and/or storing the at least one semiconductor plate, wherein said hermetic container has at least one door and is configured to be coupled to and/or decoupled from an input/output interface of a piece of equipment containing the at least one semiconductor plate;
- filling the hermetic container with hydrogen at a pressure of between 10−1 and 4*103 Pa,
- hermetically coupling the hermetic container to said input/output interface of said piece of equipment,
- moving the at least one semiconductor plate from the inside of the piece of equipment into the hermetic container via the input/output interface,
- hermetically sealing the hermetic container;
- uncoupling said hermetic container from the input/output interface of said piece of equipment;
- and
- moving said hermetic container away from said piece of equipment,
- wherein the total pressure in the hermetic container is between 10−1 and 5*104 Pa.
6 more elements
Dependencies are inferred from the claim text.