Methods for fabricating transistor and ESD device
AssigneesSemiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
InventorsYong Li, Cheng Qing Wei
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Abstract
Methods for fabricating a transistor and an electro-static discharge (ESD) device are provided. In a method, a first well area doped with a first well ion is formed in a base substrate. A second well area is doped with a second well ion in the base substrate. The second well area includes a first region adjacent to the first well area. A first ion doping region doped with first ions is formed in the first well area and the first region. A type of the first ions is the same as a type of the first well ion and opposite to a type of the second well ion. A gate structure is formed on a part of the first well area and at least a part of the first region.
Claims17
A method for fabricating a transistor, comprising:
- providing a base substrate;
- forming a first well area in the base substrate, wherein the first well area is doped with a first well ion;
- forming a second well area in the base substrate, wherein:
- the second well area is formed on a side of the first well area, abutting directly against the first well area and doped with a second well ion, and
- the second well area includes a first region adjacent to the first well area and doped with the second well ion, the first region abutting directly against the first well area;
- forming a first ion doping region in the first well area and the first region, wherein the first ion doping region is doped with first ions, and a type of the first ions is the same as a type of the first well ion and opposite to a type of the second well ion;
- and
- forming a gate structure on a part of the first well area and at least a part of the first region, wherein:
- the second well area further includes a second region, wherein the second region is adjacent to the first region, and the second region and the first well area are formed at both sides of the first region:
- the base substrate includes a fin structure, the fin structure including a first fin and a second fin,
- the first region is formed in the first fin,
- the first ion doping region is formed in the first fin and covers a top of the first fin, and
- the second region includes:
- a first portion adjacent between the first fin and the second fin, the first portion being adjacent to the first region, and
- a second portion in the second fin, the second portion being adjacent to the first portion.
Dependencies are inferred from the claim text.