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US 10,854,433 B2Granted
In-situ real-time plasma chamber condition monitoring
AssigneeApplied Materials, Inc.
InventorsTzu-Yen Hsieh, Sidda Reddy Kurakula
Life of this patent
Estimating the term…
Abstract
Methods for in-situ and real-time chamber condition monitoring is provided. For example, in one embodiment, for each wafer in a chamber, a frequency and wavelength of the free radicals in the chamber is monitored in-situ. The frequency and wavelength of the free radicals are associated with at least one selected chemical. The associated free radicals are compared to an index. The index includes a target range for each chemical in the at least one selected chemical.
Claims20
A method, comprising:
- monitoring, in-situ, for each wafer in a chamber, a frequency and wavelength of free radicals in the chamber;
- associating the frequency and wavelength of the free radicals with at least one selected chemical;
- and
- comparing the associated free radicals to an index wherein the index includes a target range for each chemical in the at least one selected chemical.
1 more element
A method for in-situ and real-time chamber condition monitoring, comprising:
- inserting at least one wafer into a plasma chamber;
- injecting a gas into a plasma chamber wherein the gas comprises a source of free radicals;
- monitoring a frequency and wavelength of the free radicals in the gas;
- associating the frequency and wavelength of the free radicals with at least one selected chemical;
- and
- comparing the associated free radicals to an index wherein the index includes a target range for each chemical in the at least one selected chemical.
3 more elements
A method, comprising:
- monitoring, in-situ, for each wafer in a chamber, a frequency and wavelength of free radicals of gases in the chamber;
- associating the frequency and wavelength of the free radicals with a chemical;
- and
- comparing the associated free radicals to an index wherein the index includes a target range for each chemical;
- and
- changing a gas recipe in the chamber in response to the comparison.
3 more elements
Dependencies are inferred from the claim text.