Plasma reactors having recuperators
AssigneeReCarbon, Inc.
InventorsGeorge Stephen Leonard, III, Stefan Andrew McClelland, Jae Mo Koo
Life of this patent
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Abstract
A plasma generating system includes a waveguide for transmitting a microwave energy therethrough and an inner wall disposed within the waveguide to define a plasma cavity, where a plasma is generated within the plasma cavity using the microwave energy. The plasma generating system further includes: an adaptor having a gas outlet through which an exhaust gas processed by the plasma exits the plasma cavity; and a recuperator directly attached to the adaptor and having a gas passageway that is in fluid communication with the gas outlet in the adaptor. The recuperator recovers heat energy from the exhaust gas and heats an input gas using the heat energy.
Claims20
A plasma generating system, comprising:
- a plasma cavity for generating a plasma therewithin;
- an adaptor having a gas outlet through which an exhaust gas processed by the plasma exits the plasma cavity;
- and
- a recuperator directly attached to the adaptor and having a gas passageway that is in fluid communication with the gas outlet in the adaptor, the recuperator being configured to recover heat energy from the exhaust gas and to heat an input gas using the heat energy, where the input gas heated by the recuperator is input to the plasma cavity,
- wherein the recuperator has an enclosed space thereinside, a gas inlet through which the input gas flows into the enclosed space and a gas outlet through which the input gas heated using the heat energy exits the enclosed space.
A plasma generating system, comprising:
- a waveguide for transmitting a microwave energy therethrough;
- an inner wall disposed within the waveguide to define a plasma cavity, a plasma being generated within the plasma cavity using the microwave energy, the waveguide having a gas outlet through which an exhaust gas processed by the plasma exits the plasma cavity;
- a recuperator directly attached to the waveguide and having a gas passageway that is in fluid communication with the gas outlet in the waveguide, the recuperator being configured to recover heat energy from the exhaust gas and to heat an input gas using the heat energy;
- a gas inlet mounted on the waveguide and configured to receive the input gas from the recuperator and introduce the input gas into the plasma cavity;
- and
- a pipe having one end coupled to the recuperator and an other end coupled to the gas inlet, wherein the input gas flows from the recuperator to the gas inlet through the pipe.
Dependencies are inferred from the claim text.