Thermal displacement compensation apparatus

A thermal displacement compensation apparatus for compensating a dimensional measurement error due to a thermal displacement of a workpiece, the thermal displacement compensation apparatus comprising a machine learning device for learning shape measurement data at a time of inspection of the workpiece, wherein

• the machine learning device includes:
• a state observing unit for observing image data showing a temperature distribution of a workpiece and shape data after machining as state variables representing a current state of environment;
• a judgment data acquisition unit for acquiring judgment data indicating shape measurement data inspected in a state in which thermal equilibrium has been attained;
• and
• a learning unit for learning the image data showing the temperature distribution of the workpiece and shape data after machining and the shape measurement data inspected in a state in which thermal equilibrium has been attained in association with each other using the state variables and the judgment data.