Confocal imaging of an object utilising a pinhole array
AssigneeAsm Technology Singapore Pte Ltd
InventorsWui Fung Sze, Jiangwen Deng
Life of this patent
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Abstract
A confocal imaging apparatus for inspecting an object comprises a light source operative to project light to illuminate the object, and an imaging device for receiving light reflected from the object along a lighting path located between the object and the imaging device. A pinhole array comprising a plurality of pinholes is positioned along the lighting path such that light reflected from the object is passed through the pinhole array. A mechanism is operative to move the pinhole array along a single axis in a linear direction transverse to the light path for transmitting an image corresponding to a substantially contiguous area of the object onto the imaging device.
Claims15
A confocal imaging apparatus for inspecting an object, the apparatus comprising:
- a light source operative to project light to illuminate the object;
- an imaging device for receiving light reflected from the object along a lighting path located between the object and the imaging device;
- a pinhole array comprising a plurality of pinholes distributed in a rectangular matrix arrangement positioned along the lighting path on a first plane that is transverse to the lighting path such that light reflected from the object is passed through the pinhole array;
- and
- a mechanism for moving the pinhole array,
- wherein the confocal imaging apparatus is configured to move the pinhole array solely along a single axis in a linear path transverse to the lighting path such that the pinholes of the plurality of pinholes of the pinhole array together through motion in the linear direction transmit an image corresponding to a substantially contiguous area of the object onto the imaging device,
- wherein the rectangular matrix arrangement is fixedly rotates at an angle with respect to the linear path moved by the pinhole array and is within the first plane.
A method for inspecting an object using a confocal imaging apparatus, the method comprising the steps of:
- illuminating the object by projecting light from a light source onto the object;
- receiving with an imaging device light reflected from the object along a lighting path located between the object and the imaging device,
- wherein light reflected from the object is passed through a pinhole array comprising a plurality of pinholes distributed in a rectangular matrix arrangement positioned along the lighting path on a first plane that is transverse to the lighting path;
- and
- moving the pinhole array along a single axis in a linear path transverse to the lighting path such that the pinholes of the plurality of pinholes of the pinhole array together through motion in the linear direction transmit an image corresponding to a substantially contiguous area of the object onto the imaging device for inspecting the object,
- wherein the rectangular matrix arrangement is fixedly rotated at an angle with respect to the linear path moved by the pinhole array and is within the first plane.
Dependencies are inferred from the claim text.