Panel for flexible digital x-ray detector and method for manufacturing the same
AssigneeLG Display Co., Ltd.
InventorsJinpil Kim, Minseok Yun
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AssigneeLG Display Co., Ltd.
InventorsJinpil Kim, Minseok Yun
Estimating the term…
A panel for a flexible digital X-ray detector and a method for manufacturing the same are disclosed. Embodiments of the flexible digital X-ray detector reduce device characteristic deterioration caused by X-ray exposure, increase flexibility to the panel by reducing a thickness of the panel yet provide rigidity to maintain the shape of the panel, and reduce residual impurities during a Laser Lift Off (LLO) process. The panel can include a multi-buffer layer in which a silicon oxide (SiOx) layer and a silicon nitride (SiNx) layer are alternately stacked, and a device array layer and a scintillator layer that are disposed over the multi-buffer layer. During the LLO process, the method for manufacturing the panel includes increasing the hydrogen content using a sacrificial layer including an amorphous silicon (a-Si) layer and a silicon nitride (SiNx) layer disposed at both surfaces of the a-Si layer, such that the amount of residual impurities in the sacrificial layer can be reduced.
A panel for a flexible digital X-ray detector comprising:
A method for manufacturing a panel for a flexible digital X-ray detector comprising:
Dependencies are inferred from the claim text.