Stray field robust xMR sensor using perpendicular anisotropy
AssigneeInfineon Technologies AG
InventorsWolfgang Raberg, Clemens Muehlenhoff, Juergen Zimmer
Life of this patent
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Abstract
A magnetoresistive sensor has a sensor plane in which the magnetoresistive sensor is sensitive to a magnetic field. The magnetoresistive sensor includes a reference layer having a reference magnetization that is fixed and that is aligned with an in-plane axis of the sensor plane; and a magnetic free layer disposed proximate to the reference layer, the magnetic free layer having a free layer magnetization aligned along an out-of-plane axis that is out-of-plane to the sensor plane. The free layer magnetization is configured to tilt away from the out-of-plane axis and towards the sensor plane in a presence of an external in-plane magnetic field.
Claims20
A magnetoresistive sensor having a sensor plane in which the magnetoresistive sensor is sensitive to a magnetic field, the magnetoresistive sensor comprising:
- a reference layer having a reference magnetization that is fixed and that is aligned with an in-plane axis of the sensor plane;
- and
- a magnetic free layer disposed proximate to the reference layer, the magnetic free layer having a free layer magnetization aligned along an out-of-plane axis that is out-of-plane to the sensor plane, wherein the free layer magnetization is configured to tilt away from the out-of-plane axis and towards the sensor plane in a presence of an external in-plane magnetic field.
A magnetoresistive sensor having a sensor plane in which the magnetoresistive sensor is sensitive to an external in-plane magnetic field, comprising:
- a first sensor arrangement comprising a first plurality of sensor elements, wherein each of the first plurality of sensor elements comprise:
- a first reference layer having a first reference magnetization that is fixed and that is aligned with a first in-plane axis of the sensor plane;
- and
- a first magnetic free layer disposed proximate to the first reference layer, the first magnetic free layer having a first free layer magnetization aligned along an out-of-plane axis;
- and
- a second sensor arrangement comprising a second plurality of sensor elements, wherein each of the second plurality of sensor elements comprise:
- a second reference layer having a second reference magnetization that is fixed and that is aligned with a second in-plane axis of the sensor plane, wherein the second in-plane axis is perpendicular to the first in-plane axis;
- and
- a second magnetic free layer disposed proximate to the second reference layer, the second magnetic free layer having a second free layer magnetization aligned along the out-of-plane axis.
Dependencies are inferred from the claim text.