Apparatus for X-ray inspection, and a method for manufacturing a semiconductor device using the same

An apparatus for X-ray inspection comprising:

• a stage on which an inspection target is loaded, the stage including a first surface and an opposite second surface;
• an X-ray generator disposed over the first surface of the stage and configured to irradiate the inspection target with incident X-rays;
• and
• a detection system disposed under the second surface of the stage and configured to detect first transmitted X-rays transmitted through the inspection target,
• wherein the detection system comprises a first lens system and a second lens system,
• the inspection target comprises a first region including a defect and a second region that is free of defects,
• the first lens system is configured to receive the first transmitted X-rays transmitted through one of the first region and the second region,
• the second lens system is configured to receive the first transmitted X-rays transmitted through only the first region,
• the first lens system comprises a first scintillator and a magnifying lens of n magnification, with n being greater than one,
• the second lens system comprises a micro zone plate (MZP), a second scintillator, and a relay lens of an equal magnification,
• when the first transmitted X-rays pass through the first lens system, the first scintillator is configured to receive the first transmitted X-rays therethrough and to convert the first transmitted X-rays into first rays, and the magnifying lens is configured to receive the first rays therethrough and to convert the first rays into second rays,
• when the first transmitted X-rays pass through the second lens system, the MZP is configured to receive the first transmitted X-rays therethrough and to convert the first transmitted X-rays into second transmitted X-rays, the second scintillator is configured to receive the second transmitted X-rays therethrough and to convert the second transmitted X-rays into third rays, and the relay lens is configured to receive the third rays therethrough and to convert the third rays into fourth rays.