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US 10,852,254 B2Granted
Foreign object inspection device and foreign object inspection method
AssigneeSumitomo Chemical Company, Limited
InventorKoji Kashu
Life of this patent
Estimating the term…
Abstract
A foreign object inspection device is provided. The device reduces the risk of a failure to detect a foreign object. A direction normal to a principal surface is inclined with respect to a direction in which an intensity of electromagnetic waves emitted from an electromagnetic wave generating source is greatest.
Claims6
A foreign object inspection device comprising:
- an electromagnetic wave generating source configured to emit electromagnetic waves toward an inspection target;
- and
- an image sensor having a principal surface on which a plurality of pixels are provided, the plurality of pixels being configured to form an image on a basis of the electromagnetic waves which have propagated through the inspection target,
- wherein a direction normal to the principal surface being inclined with respect to a direction in which an intensity of the electromagnetic waves emitted from the electromagnetic wave generating source is greatest,
- wherein the inspection target includes a layered body in which layers of film are stacked in a direction perpendicular to the direction in which the intensity of the electromagnetic waves emitted from the electromagnetic wave generating source is greatest, and
- wherein the direction normal to the principal surface is inclined toward the direction in which the layers are stacked in the layered body.
3 more elements
A foreign object inspection method comprising the steps of:
- (a) emitting electromagnetic waves toward an inspection target;
- and
- (b) forming an image with use of a plurality of pixels provided on a principal surface of an image sensor, on a basis of the electromagnetic waves which have propagated through the inspection target,
- the image sensor being provided such that a direction normal to the principal surface is inclined with respect to a direction in which an intensity of the electromagnetic waves emitted toward the inspection target is greatest,
- wherein the inspection target includes a layered body in which layers of film are stacked in a direction perpendicular to the direction in which the intensity of the electromagnetic waves emitted toward the inspection target is greatest;
- and
- wherein the image sensor is provided such that the direction normal to the principal surface is inclined toward the direction in which the layers are stacked in the layered body.
4 more elements
Dependencies are inferred from the claim text.