Specimen observation method
AssigneeHitachi High-Tech Corporation
InventorsKiyotaka Nakano, Eiko Nakazawa
Life of this patent
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Abstract
A device for observing a specimen, such as a charged particle beam device exemplified by a scanning electron microscope and a transmission electron microscope in which an operator can specify minute bubbles with high contrast in a charged particle beam image of a liquid subjected to processing of generating bubbles, using a phenomenon in which contrast as high as an operator can specify minute bubbles is provided in a charged particle beam image of a specimen including an ionic liquid and a liquid subjected to processing of generating bubbles, thus making it possible to recognize minute bubbles in a liquid.
Claims12
A specimen observation method comprising:
- a capturing step of obtaining a charged particle beam image of a specimen including an ionic liquid and a liquid subjected to processing of generating bubbles,
- wherein the capturing step includes an in-situ observing step of the specimen, and
- wherein the in-situ observing step includes a circulating step of circulating the specimen through a flow passage for observing movement of said bubbles with time.
A specimen observation method comprising:
- a capturing step of obtaining a charged particle beam image of a specimen including an ionic liquid and a liquid capable of generating bubbles,
- wherein the capturing step corresponds to an in-situ observation of bubbles, and
- wherein the in-situ observing step includes a circulating step of circulating the specimen through a flow passage for observing movement of said bubbles with time.
Dependencies are inferred from the claim text.