Apparatus for inspecting object surface

An apparatus for inspecting an object surface comprising:

• an imaging device including an imaging area;
• an optical source;
• a first partial transmission device including a transmission portion in a central part, a part of a light emitted from the optical source passing through the transmission portion;
• a second partial transmission device including a light interception portion in a central part;
• a first lens disposed on one side of the first partial transmission device opposite from the optical source;
• a second lens, a third lens, and a fourth lens having a common optical axis, the second lens being disposed between the third lens and the fourth lens, an optical axis of the first lens intersecting with a line connecting a center of the second lens to a center of the fourth lens;
• and
• a half mirror disposed between the second lens and the fourth lens;
• wherein:
• the first lens is disposed separate from the first partial transmission device at a focal length of the first lens;
• the half mirror reflects a light from the first lens and propagates the light to the second lens;
• the second lens propagates the light propagated from the half mirror to the third lens;
• the third lens causes the light propagated from the second lens to be incident to a surface of an object and propagates a light reflected at the surface of the object to the second lens;
• the second lens propagates the light reflected at the surface to the half mirror;
• the half mirror passes the light propagated from the second lens and propagates the light to the fourth lens;
• the fourth lens causes the light propagated from half mirror to form an image in the imaging area of the imaging device through the second partial transmission device;
• and
• the light interception portion of the second partial transmission device blocks a regular reflection light in the light reflected at the surface of the object.